Rita Van Hoof

High density interconnect substrates using multilayer thin film technology on laminate substrates (MCM‐SL/D)

Andreas Ostmann, Steven Brebels, Eric Beyne, 2000 .

(Invited) SiGe MEMS Technology: A Platform Technology Enabling Different Demonstrators

Robert Puers, Herbert De Smet, Simone Severi, 2010 .

Improvement of PECVD Silicon–Germanium Crystallization for CMOS Compatible MEMS Applications

Ann Witvrouw, Stefaan Decoutere, Simone Severi, 2010 .