Roel Beernaert

(Invited) SiGe MEMS Technology: A Platform Technology Enabling Different Demonstrators

Robert Puers, Herbert De Smet, Simone Severi, 2010 .

Micromirror with electromechanical pulse width modulation

Aykut Avci, Jelle De Smet, Herbert De Smet, 2009 .

Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film

Jean-Pierre Celis, Ingrid De Wolf, Jeroen De Coster, 2010 .

Novel micromirror design with variable pull-in voltage

Aykut Avci, Jelle De Smet, Herbert De Smet, 2010 .