Yoshiya Egashira

Development of an ultra-precision stage control system using nonresonant ultrasonic motor

Kiyoshi Ohishi, Tadahiro Ohmi, K. Kosaka, 2003, IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468).

Development of nonresonant ultrasonic motor with sub-nanometer resolution

Tadahiro Ohmi, Hiroshi Kubota, Akira Nakada, 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

Slip-free driving method for nonresonant piezoelectric actuator

Hiroyuki Furukawa, Tadahiro Ohmi, K. Kosaka, 2005 .

Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage

Hiroshi Kubota, T. Harada, Akira Nakada, 2001 .

Wear reduction method for frictionally fast feeding piezoactuator

Hiroyuki Furukawa, Tadahiro Ohmi, Seiji Hashimoto, 2006 .

0.69 nm resolution ultrasonic motor for large stroke precision stage

Tadahiro Ohmi, H. Kubota, T. Harada, 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).