Christian Stadelhoff

Status of EUV reflectometry at PTB

Andreas Fischer, Frank Scholze, Victor Soltwisch, 2013, Advanced Lithography.

Update on EUV radiometry at PTB

Christian Buchholz, Frank Scholze, Victor Soltwisch, 2016, SPIE Advanced Lithography.

High-accuracy EUV reflectometry at large optical components and oblique incidence

Christian Buchholz, Andreas Fischer, Frank Scholze, 2009, Advanced Lithography.

Characterization of the polarization properties of PTB's EUV reflectometry system

Andreas Fischer, Frank Scholze, Christian Buchholz, 2010, Advanced Lithography.

Photon detector calibration in the EUV spectral range at PTB

Andreas Fischer, Frank Scholze, Christian Buchholz, 2019, Advanced Lithography.

Polarization resolved measurements with the new EUV ellipsometer of PTB

Andreas Fischer, Frank Scholze, Victor Soltwisch, 2015, Advanced Lithography.