V. Häublein

Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication

Georg Roeder, Martin Schellenberger, Anton J. Bauer, 2018, Lecture Notes in Electrical Engineering.

Effective work function tuning in high-κ dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping

Lothar Frey, Heiner Ryssel, Anton J. Bauer, 2010 .

The effect of random dopant fluctuations on the minimum channel length of short-channel MOS transistors

T. Mikolajick, V. Häublein, T. Mikolajick, 1997 .

Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications

Lothar Frey, Anton J. Bauer, V. Häublein, 2011 .