Eric Eva

发表

Stability of optical interference coatings exposed to low-fluence 193-nm ArF radiation

Norbert Kaiser, Holger Blaschke, Roland Thielsch, 1998, Advanced Lithography.

Pulse-length dependence of absorptance and degradation rate of fused silica at 248 nm

Klaus R. Mann, Eric Eva, Stephan Thomas, 1997, Laser Damage.

Compaction and rarefaction of fused silica with 193-nm excimer laser exposure

William N. Partlo, Eric Eva, Frank Stietz, 2003, SPIE Advanced Lithography.

Surface finish and optical quality of CaF2 for UV lithography applications

Norbert Kaiser, Roland Thielsch, Klaus R. Mann, 1998, Advanced Lithography.

Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry

Klaus R. Mann, Eric Eva, 1998, Advanced Lithography.

Characterizing absorption and total scattering losses on optical components for 193-nm wafer steppers

Klaus R. Mann, Eric Eva, Oliver Apel, 1999, Advanced Lithography.

Influence of the number of double layers on the damage threshold of Al2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm

Norbert Kaiser, Klaus R. Mann, Eric Eva, 1996, Laser Damage.

Characterization of absorption and degradation on optical components for high-power excimer lasers

Klaus R. Mann, Eric Eva, Bernd Granitza, 1996, Laser Damage.

ArF radiation resistance of optical coatings on CaF2 in relation to the surface finish of the substrate

Norbert Kaiser, Roland Thielsch, Joerg Heber, 1999, Laser Damage.

Very high damage threshold Al2O3/SiO2 dielectric coatings for excimer lasers

Norbert Kaiser, Klaus R. Mann, Eric Eva, 1994, Laser Damage.

Characterization of absorption and scatter losses on optical components for ArF excimer lasers

Klaus R. Mann, Eric Eva, Oliver Apel, 1999, Laser Damage.

Two-photon equivalent weighting of spatial excimer laser beam profiles

Eric Eva, Harry H. Bauer, A. Pfeiffer, 2001, SPIE Laser Damage.

Damage testing and characterization of dielectric coatings for high-power excimer lasers

Klaus R. Mann, Eric Eva, A. Hopfmueller, 1994, Other Conferences.

High-resolution calorimetric absorption measurements on optical components for excimer lasers

Klaus R. Mann, Eric Eva, 1997, Laser Damage.

Nonlinear absorption phenomena in optical materials for the UV-spectral range

Klaus R. Mann, Eric Eva, 1996, Other Conferences.

Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

Norbert Kaiser, Detlev Ristau, Klaus R. Mann, 1995, Laser Damage.

Multiple-pulse damage thresholds of optical components for excimer lasers

Klaus R. Mann, Eric Eva, Bernd Granitza, 1997, Laser Damage.

Nonlinear absorption phenomena in optical materials for the UV-spectral range

Klaus R. Mann, Eric Eva, 1997 .

High damage threshold Al2O3SiO2 dielectric coatings for excimer lasers

Hein Uhlig, Norbert Kaiser, Klaus R. Mann, 1995 .