Tsuyoshi Horikawa

发表

High-performance silicon photonics platform for low-power photonic integrated circuits

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita, 2017, 2017 MIXDES - 24th International Conference "Mixed Design of Integrated Circuits and Systems.

High-density optical interconnects by using silicon photonics

Yasuhiko Arakawa, Koji Yamada, Takahiro Nakamura, 2014, Photonics West - Optoelectronic Materials and Devices.

Low-loss and flatband silicon-nanowire-based 5th-order coupled resonator optical waveguides (CROW) fabricated by ArF-immersion lithography process on a 300-mm SOI wafer

Minoru Ohtsuka, Nobuyuki Yokoyama, Miyoshi Seki, 2014, Photonics West - Optoelectronic Materials and Devices.

(Ba_<0.75>Sr_<0.25>)TiO_3 Films for 256 Mbit DRAM (Special Issue on Quarter Micron Si Device and Process Technologies)

Tsuyoshi Horikawa, Noboru Mikami, Hiromi Ito, 1994 .

Demonstration of over 1000-channel hybrid integrated light source for ultra-high bandwidth interchip optical interconnection

Yasuhiko Arakawa, Hiroyuki Takahashi, Tsuyoshi Horikawa, 2014, OFC 2014.

High-density silicon optical interposer for inter-chip interconnects based on compact and high speed components

Yasuhiko Arakawa, Koji Yamada, Junichi Fujikata, 2013, CLEO: 2013.

Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics

Kenji Okada, Koji Tominaga, Tsuyoshi Horikawa, 2005, Microelectron. Reliab..

Fingertip-Size Optical Module, "Optical I/O Core", and Its Application in FPGA

Hiroshi Yamaguchi, Jun Ushida, Junichi Fujikata, 2019, IEICE Trans. Electron..

Athermal silicon optical interposers operating up to 125° C

Yasuhiko Arakawa, Koji Yamada, Takahiro Nakamura, 2015, Photonics West - Optoelectronic Materials and Devices.

Resonant Wavelength Variation Modelling for Microring Resonators based on Fabrication Deviation Analysis

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2017, 2017 European Conference on Optical Communication (ECOC).

Spectral variation analysis of integrated silicon photonics devices by using optical wafer probing

Tohru Mogami, Tsuyoshi Horikawa, 2018, 2018 International Conference on IC Design & Technology (ICICDT).

Integration of BaxSr1-xTiO3 thin film for DRAM application

Makoto Hirayama, Tsuyoshi Horikawa, Tadashi Nishimura, 1995, Advanced Lithography.

Large-scale silicon photonics integrated circuits for interconnect and telecom applications

Yasuhiko Arakawa, Koji Yamada, Yasuhiko Ishikawa, 2013, 10th International Conference on Group IV Photonics.

High performance PIN Ge photodetector and Si optical modulator with MOS junction for photonics-electronics convergence system

Yasuhiko Arakawa, Masashi Takahashi, Takahiro Nakamura, 2013, 2013 18th Asia and South Pacific Design Automation Conference (ASP-DAC).

A 300-mm-wafer silicon photonics technology for advanced information systems

Masaya Notomi, Akihiko Shinya, Masahiko Mori, 2019, 2019 2nd International Symposium on Devices, Circuits and Systems (ISDCS).

Advances in High-Density Inter-Chip Interconnects with Photonic Wiring

Yasuhiko Arakawa, Koji Yamada, Takahiro Nakamura, 2013, IEICE Trans. Electron..

High-resolution display using a laser-addressed ferroelectric liquid-crystal light valve

Hajime Nakajima, Tsuyoshi Horikawa, Shin Tahata, 1991, Medical Imaging.

Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition

Kouichi Ono, Tsuyoshi Horikawa, Junji Tanimura, 1998 .

Dielectric Properties of (BaxSr1-x)TiO3 Thin Films Prepared by RF Sputtering for Dynamic Random Access Memory Application

Tsuyoshi Horikawa, Noboru Mikami, Tetsuro Makita, 1994 .

Process control and monitoring in device fabrication for optical interconnection using silicon photonics technology

Tohru Mogami, Seok-Hwan Jeong, Tsuyoshi Horikawa, 2015, 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).

Mach-Zehnder filter using multiple Si waveguide structure sections for width error tolerance

Munehiro Toyama, Miyoshi Seki, Hironori Sasaki, 2012 .

Low-loss silicon wire waveguides for optical integrated circuits

Tohru Mogami, Tsuyoshi Horikawa, Daisuke Shimura, 2016 .

The impacts of ArF Excimer Immersion Lithography on Integrated Silicon Photonics Tech.

Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, 2012 .

Si Waveguide-Integrated Metal-Semiconductor-Metal and p-i-n-Type Ge Photodiodes Using Si-Capping Layer

Yasuhiko Arakawa, Junichi Fujikata, Masataka Noguchi, 2013 .

1.2 Tbps/cm2 Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2018, Journal of Lightwave Technology.

Si Waveguide-Integrated MSM Ge Photodiode

Yasuhiko Arakawa, Junichi Fujikata, Masataka Noguchi, 2011 .

High precision Si waveguide devices designed for 1.31μm and 1.55μm wavelengths on 300mm-SOI

Tohru Mogami, Hironori Sasaki, Seok-Hwan Jeong, 2014, 11th International Conference on Group IV Photonics (GFP).

A newly designed planar stacked capacitor cell with high dielectric constant film for 256 Mbit DRAM

K. Sato, Tsuyoshi Horikawa, K. Moriizumi, 1993, Proceedings of IEEE International Electron Devices Meeting.

Dual-Tapered 10-µm-Spot-Size Converter with Double Core for Coupling Polarization-Independent Silicon Rib Waveguides to Single-Mode Optical Fibers

Tsuyoshi Horikawa, Masatoshi Tokushima, T. Horikawa, 2012 .

Low frequency noise characteristics in HfAlOx/SiO2 n-MOSFETs

Koji Akiyama, Koji Tominaga, A. Toriumi, 2004 .

First demonstration of athermal silicon optical interposers with quantum dot lasers operating up to 125 °C

Yasuhiko Arakawa, Hiroshi Fukuda, Koji Yamada, 2014, 2014 The European Conference on Optical Communication (ECOC).

45 GHz Bandwidth of Si Waveguide-Integrated PIN Ge Photodiode,and its Zero-Bias Voltage Operation

Yasuhiko Arakawa, Junichi Fujikata, Masataka Noguchi, 2012 .

Ba 0.75 Sr 0.25 )TiO 3 Films for 256 Mbit DRAM

Tsuyoshi Horikawa, Noboru Mikami, Yoshikazu Ohno, 1994 .

The impacts of fabrication error in Si wire-waveguides on spectral variation of coupled resonator optical waveguides

Tohru Mogami, Seok-Hwan Jeong, Tsuyoshi Horikawa, 2016 .

High speed and highly efficient Si optical modulator with MOS junction for 1.55 µm and 1.3 µm wavelengths

Junichi Fujikata, Tsuyoshi Horikawa, J. Fujikata, 2013, 10th International Conference on Group IV Photonics.

Demonstration of 12.5-Gbps optical interconnects integrated with lasers, optical splitters, optical modulators and photodetectors on a single silicon substrate

Yasuhiko Arakawa, H. Takahashi, Koji Yamada, 2014 .

Compact PIN-Diode-Based Silicon Modulator Using Side-Wall-Grating Waveguide

Munehiro Toyama, Miyoshi Seki, Keiji Koshino, 2013, IEEE Journal of Selected Topics in Quantum Electronics.

Low-loss Si waveguides with Variable-Shaped-Beam EB Lithography for Large-scaled Photonic Circuits

Tsuyoshi Horikawa, Naoki Hirayama, Hiroyuki Takahashi, 2012 .

A 300-mm Silicon Photonics Platform for Large-Scale Device Integration

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2018, IEEE Journal of Selected Topics in Quantum Electronics.

High-performance optical waveguide devices using 300mm Si photonics platform

Tohru Mogami, Hironori Sasaki, Ken Morito, 2016 .

Low-loss, flat-topped and spectrally uniform silicon-nanowire-based 5th-order CROW fabricated by ArF-immersion lithography process on a 300-mm SOI wafer.

Minoru Ohtsuka, Nobuyuki Yokoyama, Miyoshi Seki, 2013, Optics express.

Demonstration of 12.5-Gbps optical interconnects integrated with lasers, optical splitters, optical modulators and photodetectors on a single silicon substrate

Yasuhiko Arakawa, Koji Yamada, Hideaki Okayama, 2012, 2012 38th European Conference and Exhibition on Optical Communications.

Dielectric Properties of (Ba, Sr)TiO3 Thin Films Deposited by RF Sputtering

Masahiro Nunoshita, Tsuyoshi Horikawa, Noboru Mikami, 1993 .

12.5-Gb/s operation with 0.29-V·cm V(π)L using silicon Mach-Zehnder modulator based-on forward-biased pin diode.

Hideaki Okayama, Tsuyoshi Horikawa, Takeshi Akagawa, 2012, Optics express.

Extraction of SOI thickness deviation based on resonant wavelength analysis for silicon photonics devices

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2017, 2017 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).

Advantages of HfAlON gate dielectric film for advanced low power CMOS application

Koji Tominaga, Tsuyoshi Horikawa, Akira Toriumi, 2005 .

High-performance silicon photonics process platform for low-power photonic integrated circuits

Tohru Mogami, Junichi Fujikata, Tsuyoshi Horikawa, 2016, 2016 IEEE Silicon Nanoelectronics Workshop (SNW).

Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography

Nobuyuki Yokoyama, Miyoshi Seki, Keiji Koshino, 2013 .

High-speed and high-efficiency Si optical modulator with MOS junction, using solid-phase crystallization of polycrystalline silicon

Junichi Fujikata, Tsuyoshi Horikawa, Takahiro Nakamura, 2016 .

Si-nanowire-based multistage delayed Mach-Zehnder interferometer optical MUX/DeMUX fabricated by an ArF-immersion lithography process on a 300 mm SOI wafer.

Seok-Hwan Jeong, Ken Morito, Yu Tanaka, 2014, Optics letters.

Ferroelectric Liquid Crystal Light Valve Using SiO2 / A-Si:H Photodiode

Masahiro Nunoshita, Tsuyoshi Horikawa, Noboru Mikami, 1991 .

Demonstration of 30-Tbps/cm2 Bandwidth Density by Silicon Optical Interposers Fully Integrated with Optical Components

Yasuhiko Arakawa, Hiroshi Fukuda, Koji Yamada, 2013 .

Si wire array waveguide grating with parallel star coupler configuration fabricated by ArF excimer immersion lithography

Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, 2013 .

Reliable Extractions of EOT and Vfb in Poly-Si Gate High-k MISFETs through Advanced Modeling of Gate and Substrate Capacitances

A. Toriumi, Tsuyoshi Horikawa, Naoki Yasuda, 2005 .