J. Wesselingh

Contactless Positioning using an Active Air Film

J. Wesselingh, 2011 .

Planar wafer transport and positioning on an air film using a viscous traction principle

R. H. Munnig Schmidt, Jo W. Spronck, J. van Eijk, 2009 .

Contactless 6 DoF Planar Positioning System Utilizing an Active Air Film

J. van Eijk, J. Wesselingh, J. Spronck, 2010 .