Karsten Frenner

GPU-accelerated simulation of the superresolution capabilities of dielectric microspheres using the Differential Method

Wolfgang Osten, Johannes Drozella, Karsten Frenner, 2018, Photonics Europe.

Different approaches to overcome existing limits in optical micro- and nano-metrology

Philipp Schau, Karsten Frenner, Wolfgang Osten, 2011 .

Improvements on the simulation of microscopic images for the defect detection of nanostructures

Wolfgang Osten, Uwe Seifert, Karsten Frenner, 2008, SPIE Advanced Lithography.

Inverse calculation of position and tilt errors of optical components from wavefront data

Wolfgang Osten, Peter Eberhard, Karsten Frenner, 2011, Optical Metrology.

Polarization scrambling with metallic meander structures for space applications

Wolfgang Osten, Philipp Schau, Karsten Frenner, 2012, Photonics Europe.

Effective–CD: a contribution toward the consideration of line edge roughness in the scatterometric critical dimension metrology

Wolfgang Osten, Karsten Frenner, Bartosz Bilski, 2017 .

Phase-structured illumination as a tool to detect nanometer asymmetries

Wolfgang Osten, Karsten Frenner, M. L. Gödecke, 2016 .

Reconstruction of dynamical perturbations in optical systems by opto-mechanical simulation methods

Wolfgang Osten, Peter Eberhard, Karsten Frenner, 2012, Advanced Lithography.