Paul Turner

Comparison of deposition techniques for Mo/Si reflective multilayers for EUV mask blanks

Kenji Yamamoto, Katrina Rook, Antonio Checco, 2021, Photomask Technology.

Optimization of ion-beam-deposited Mo/Si multilayers for extreme ultraviolet masks

Kenji Yamamoto, Katrina Rook, Narasimhan Srinivasan, 2021 .