Daniel Brown

Laser produced plasma EUV sources for N5 HVM and beyond: performance, availability and technology innovation

David C. Brandt, Michael Purvis, Igor Fomenkov, 2021 .

Advances toward high power EUV sources for EUVL scanners for HVM in the next decade and beyond

David C. Brandt, Michael Purvis, Igor Fomenkov, 2021 .