James Cameron

Progress towards production worthy developable BARCs (DBARCs)

James Cameron, John Amara, Gregory Prokopowicz, 2009, Advanced Lithography.

Automation of the Timed-Up-and-Go Test Using a Conventional Video Camera

Erik Scheme, James A. D. Cameron, James Cameron, 2020, IEEE Journal of Biomedical and Health Informatics.

Design and development of production-worthy developable BARCs(DBARCs) for implant lithography

James Cameron, John Amara, Jin Wuk Sung, 2010, Advanced Lithography.

Understanding EUV resist mottling leading to better resolution and linewidth roughness

James Cameron, Paul LaBeaume, Suzanne Coley, 2014, Advanced Lithography.

Progress in resolution, sensitivity, and critical dimensional uniformity of EUV chemically amplified resists

James Cameron, Paul LaBeaume, Suzanne Coley, 2013, Advanced Lithography.

Developable BARC (DBARC) technology as a solution to today's implant lithography challenges

James Cameron, Adam Ware, Yoshihiro Yamamoto, 2011, Advanced Lithography.