Adam Ware

Progress towards production worthy developable BARCs (DBARCs)

James Cameron, John Amara, Gregory Prokopowicz, 2009, Advanced Lithography.

Design and development of production-worthy developable BARCs(DBARCs) for implant lithography

James Cameron, John Amara, Jin Wuk Sung, 2010, Advanced Lithography.

Developable BARC (DBARC) technology as a solution to today's implant lithography challenges

James Cameron, Adam Ware, Yoshihiro Yamamoto, 2011, Advanced Lithography.

Design and development of developable BARCs (DBARCs) for advanced lithographic applications

James F. Cameron, David Valeri, Adam Ware, 2010 .