T. E. Zavecz

Exposure tool purchase decisions: Evaluation techniques and common pitfalls

T. E. Zavecz, 1997 .

Glass Wafer Processing And Inspection For Qualification Of Reticles In A Fineline Wafer Stepper Production Facility

T. E. Zavecz, J. A. Reynolds, R. T. Hilton, 1985, Advanced Lithography.