Shiyuan Liu

发表

Simulations of the transmission small angle x-ray scattering for three-dimensional architectures

Xiuguo Chen, Jianyuan Ma, Tianjuan Yang, 2021, International Symposium on Precision Mechanical Measurements.

Determination of an optimal measurement configuration in optical scatterometry using global sensitivity analysis

Chuanwei Zhang, Xiuguo Chen, Zhengqiong Dong, 2014 .

Development of a broadband Mueller matrix ellipsometer as a powerful tool for nanostructure metrology

Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu, 2015 .

(Invited) Mueller Matrix Polarimetry: A Powerful Tool for Nanostructure Metrology

Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu, 2014 .

Depolarization effects from nanoimprinted grating structures as measured by Mueller matrix polarimetry

Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu, 2013 .

A single-image method of aberration retrieval for imaging systems under partially coherent illumination

Chuanwei Zhang, Haiqing Wei, Shiyuan Liu, 2014 .

Illumination source optimization in optical lithography via derivative-free optimization.

Edmund Y Lam, Xiaofei Wu, Wen Lv, 2014, Journal of the Optical Society of America. A, Optics, image science, and vision.

MBIR reflectance spectrometry for deep trench structure with ANN and Levenberg-Marquardt combined algorithm

Tielin Shi, Chuanwei Zhang, Shiyuan Liu, 2008, 2008 3rd International Conference on Sensing Technology.

Fast algorithm for quadratic aberration model in optical lithography based on cross triple correlation

Wei Liu, Shiyuan Liu, W. Liu, 2011 .

Mueller matrix imaging ellipsometry for nanostructure metrology.

Hao Jiang, Chuanwei Zhang, Xiuguo Chen, 2015, Optics express.

An optimized process for fabrication of high-aspect-ratio photoresist-derived carbon microelectrode array on silicon substrate

Tielin Shi, Zirong Tang, Lei Nie, 2010 .

Sensitivity analysis for nanostructure metrology by Mueller matrix polarimetry

Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu, 2010, Advances in Optoelectronics and Micro/nano-optics.

Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometry.

Hao Jiang, Chuanwei Zhang, Jinlong Zhu, 2015, Optics letters.

Fast aerial image simulations for partially coherent systems by transmission cross coefficient decomposition with analytical kernels

Wen Lv, Xinjiang Zhou, Shiyuan Liu, 2012 .

Fast Evaluation of Aberration-Induced Intensity Distribution in Partially Coherent Imaging Systems by Cross Triple Correlation

Xiaofei Wu, Wei Liu, Shiyuan Liu, 2011 .

Statistical Analysis of Frequency Estimation Methods of Vibration Signal

Tielin Shi, Shiyuan Liu, Jian Ping Xuan, 2009 .

Mueller matrix ellipsometric detection of profile asymmetry in nanoimprinted grating structures

Hao Jiang, Chuanwei Zhang, Zhimou Xu, 2014 .

Application of measurement configuration optimization for accurate metrology of sub-wavelength dimensions in multilayer gratings using optical scatterometry.

Jinlong Zhu, Yating Shi, Lynford L Goddard, 2016, Applied optics.

Ellipsometry study on Pd thin film grown by atomic layer deposition with Maxwell–Garnett effective medium approximation model

Rong Chen, Xiuguo Chen, Kun Cao, 2015 .

Accurate characterization of nanoimprinted resist patterns using Mueller matrix ellipsometry.

Hao Jiang, Tangyou Sun, Chuanwei Zhang, 2014, Optics express.

Optimal broadband Mueller matrix ellipsometer using multi-waveplates with flexibly oriented axes

Hao Jiang, Chuanwei Zhang, Xiuguo Chen, 2016 .

Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology

Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu, 2012 .

Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology.

Hao Jiang, Chuanwei Zhang, Xiuguo Chen, 2016, The Review of scientific instruments.

High‐throughput dielectrophoretic manipulation of bioparticles within fluids through biocompatible three‐dimensional microelectrode array

Tielin Shi, Lei Zhang, Zirong Tang, 2011, Electrophoresis.

Formulation of error propagation and estimation in grating reconstruction by a dual-rotating compensator Mueller matrix polarimeter

Chuanwei Zhang, Xiuguo Chen, Honggang Gu, 2014 .

Modeling and simulation of infrared reflectance spectra of deep trench structures of DRAM

Tielin Shi, Chuanwei Zhang, Shiyuan Liu, 2008, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.