Motohiro Takahashi

Design Concept and Structural Configuration of Magnetic Levitation Stage with Z-Assist System

Motohiro Takahashi, 2021, Int. J. Autom. Technol..

On-Machine Optical Surface Profile Measuring System for Nano-Machining

Kimiyuki Mitsui, Hayato Yoshioka, Hidenori Shinno, 2011, Int. J. Autom. Technol..

A Study on Nanometer-Scale Vibration Canceller for Ultra Precision Positioning Stage

Hironori Ogawa, Masaki Odai, Motohiro Takahashi, 2017 .