G. Owen

Spatial correlation of electron‐beam mask errors and the implications for integrated circuit yield

Jun Ye, C. N. Berglund, Nadim I. Maluf, 1992 .

Rational argument for the impracticability of 1× reticles

Jun Ye, Nadim I. Maluf, G. Owen, 1993, Photomask Technology.

Masks for Markle-Dyson optics

G. Owen, Roger Fabian W. Pease, David A. Borkholder, 1994, Photomask Technology.