M. Krueger
发表
C. Hohle,
R. Galler,
K.-H. Choi,
2011,
European Mask and Lithography Conference.
C. Hohle,
R. Galler,
K.-H. Choi,
2010,
Photomask Technology.
M. Krueger,
S. Raetzke,
M. Koch,
2013
.
R. Galler,
M. Krueger,
M. Suelzle,
2010,
European Mask and Lithography Conference.
Harald Weber,
M. Krueger,
2008
.
R. Galler,
M. Krueger,
L. E. Ramos,
2011,
Photomask Technology.
R. Galler,
M. Krueger,
L. E. Ramos,
2012,
European Mask and Lithography Conference.
R. Galler,
M. Krueger,
M. Suelzle,
2009,
European Mask and Lithography Conference.