Yusuke Saito

Digital scanner, optical maskless exposure tool with DUV solid state laser

Soichi Owa, Yuho Kanaya, Noriyuki Hirayanagi, 2021, Advanced Lithography.

Subpixel pattern edge placement controllability of digital scanner

Soichi Owa, Yuho Kanaya, Noriyuki Hirayanagi, 2021, Photomask Technology.

Detection of three-axis angles by an optical sensor

Yoshikazu Arai, Wei Gao, Yusuke Saito, 2009 .

Investigation of an optical sensor for small tilt angle detection of a precision linear stage

Yoshikazu Arai, Wei Gao, Yusuke Saito, 2010 .

Development of a Sensitive Two-Axis Micro-Angle Sensor

Wei Gao, Satoshi Kiyono, Hiroki Shimizu, 2006 .

A Single Lens Micro-Angle Sensor

Wei Gao, Satoshi Kiyono, Yusuke Saito, 2007 .