Takahiro Ode

Three-dimensional quantification with laser scanning confocal microscopy

Takahiro Ode, Satoshi Komiya, 1993, Other Conferences.

Performance of i- and g-line phase-shift measurement system MPM-100

Hiroshi Fujita, Hisatake Sano, Takahiro Ode, 1996, Photomask and Next Generation Lithography Mask Technology.

Direct phase-shift measurement with transmitted deep-UV illumination

Takahiro Ode, Haruhiko Kusunose, Daikichi Awamura, 1996, Photomask and Next Generation Lithography Mask Technology.

Direct phase measurement in phase-shift masks with a differential heterodyne interferometer

Hiroshi Fujita, Hiroshi Nakanishi, Hisatake Sano, 1994, Photomask Technology.

Side-looking confocal microscope

Takahiro Ode, Satoshi Komiya, Daikichi Awamura, 1990, Other Conferences.

Transmittance measurement with interferometer system

Takahiro Ode, Haruhiko Kusunose, Daikichi Awamura, 1996, Photomask and Next Generation Lithography Mask Technology.