Shoumian Chen

Machine learning virtual SEM metrology and SEM-based OPC model methodology

Xuelong Shi, Yan Yan, Wei Yuan, 2021, Journal of Micro/Nanopatterning, Materials, and Metrology.

A Novel Structure On-Chip Spiral Inductors with Gradually Changed Metal Line Width and Space

Yong Wang, Yanling Shi, Yanfang Ding, 2006, 2006 IEEE International Conference on Information Acquisition.

TCAD‐based statistical modeling methodology for nanoscale FinFET variability

Ao Guo, Shoumian Chen, Shaojian Hu, 2019, Microwave and Optical Technology Letters.

Plasma induced damage from HDP process on the ultra-thin gate oxide

J. Sudijono, Xu Zeng, Shoumian Chen, 1999, 1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395).

Gate length scaling optimization of FinFETs

Shoumian Chen, Shoumian Chen, Enming Shang, 2018, International Journal of Modern Physics B.