M. Muroyama

Massively parallel electron beam direct writing (MPEBDW) system based on micro-electro-mechanical system (MEMS)/nanocrystalineSi emitter array

A. Kojima, N. Ikegami, T. Yoshida, 2014, Advanced Lithography.

Development of ballistic hot electron emitter and its applications to parallel processing: active-matrix massive direct-write lithography in vacuum and thin films deposition in solutions

N. Ikegami, T. Yoshida, H. Miyaguchi, 2015, Advanced Lithography.

A variation-aware low-power coding methodology for tightly coupled buses

H. Yasuura, K. Makiyama, M. Muroyama, 2005, Proceedings of the ASP-DAC 2005. Asia and South Pacific Design Automation Conference, 2005..

Sensor network serial communication system with high tolerance to timing and topology variations

T. Nakayama, M. Muroyama, Y. Hata, 2015, 2015 IEEE SENSORS.

Development of maskless electron-beam lithography using nc-Si electron-emitter array

A. Kojima, H. Miyaguchi, M. Muroyama, 2013, Advanced Lithography.

A 1.7mm3 MEMS-on-CMOS tactile sensor using human-inspired autonomous common bus communication

T. Nakayama, M. Muroyama, H. Funabashi, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

Integration and packaging technology of MEMS-on-CMOS tactile sensor for robot application using molded thick BCB layer and backside-grooved electrical connection

M. Muroyama, M. Fujiyoshi, Y. Nonomura, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

An SOI tactile sensor with a quad seesaw electrode for 3-axis complete differential detection

M. Muroyama, H. Funabashi, Y. Omura, 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

Flipped CMOS-diaphragm capacitive tactile sensor surface mountable on flexible and stretchable bus line

M. Muroyama, H. Funabashi, Y. Hata, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).