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Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

Lieve Van Look, Eric Hendrickx, Marina Y. Timmermans, 2021 .

CNT pellicles: imaging results of the first full-field EUV exposures

Lieve Van Look, Eric Hendrickx, Marina Y. Timmermans, 2021, Advanced Lithography.