Pär Broman

Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

Lieve Van Look, Eric Hendrickx, Marina Y. Timmermans, 2021 .

CNT pellicles: imaging results of the first full-field EUV exposures

Lieve Van Look, Eric Hendrickx, Marina Y. Timmermans, 2021, Advanced Lithography.