M. Booth

RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles

M. Booth, A. Brunton, Julian S. Cashmore, 2005, SPIE Photomask Technology.

RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles

M. Booth, A. Brunton, Julian S. Cashmore, 2006, SPIE Advanced Lithography.

High-resolution EUV imaging tools for resist exposure and aerial image monitoring

M. Booth, Julian S. Cashmore, P. Elbourn, 2005, SPIE Advanced Lithography.