James P. Spallas

Self-aligned-double-level metal process for massively arrayed electron-beam lithography systems

Noel C. MacDonald, James P. Spallas, Yosef Y. Shacham-Diamand, 1995, Other Conferences.

At-wavelength testing of optics for EUV

Kenneth A. Goldberg, Jeffrey Bokor, David T. Attwood, 1995, Advanced Lithography.

Low Voltage Microscopy

James P. Spallas, 2012 .

Self-aligned silicon field emission cathode arrays formed by selective, lateral thermal oxidation of silicon

Noel C. MacDonald, James P. Spallas, J. H. Das, 1993 .