Takashi Kobayashi

Silicon pressure sensor integrates resonant strain gauge on diaphragm

K. Ikeda, Kuwayama Hideki, Takashi Kobayashi, 1990 .

Fabrication And Characterization Of A Silicon Capacitive Structure For Simultaneous Detection Of Acceleration And Angular Rate

Masayoshi Esashi, Jun Mizuno, Takashi Kobayashi, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

The Prandtl micro flow sensor (PMFS) : a novel silicon diaphragm capacitive sensor for flow-velocity measurement

Takashi Kobayashi, Oliver Berberig, Kay Nottmeyer, 1998 .

Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

Yoshida Takashi, Harada Kinji, Kuwayama Hideki, 1990 .

Micromachined flow sensor for fuel injection

Takashi Kobayashi, Jun Mizuno, Kay Nottmeyer, 2000 .