M. Shikida
发表
T. Shimizu,
M. Shikida,
K. Sato,
2002,
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
M. Shikida,
Y. Hasegawa,
D. Ogura,
2008
.
M. Shikida,
K. Itoigawa,
Y. Hasegawa,
2004
.
M. Shikida,
K. Shimizu,
H. Sasaki,
2010,
Biomedical microdevices.
M. Shikida,
K. Sato,
K. Itoigawa,
2004,
Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004..
M. Shikida,
Kazuo Sato,
1992,
[1992] Proceedings IEEE Micro Electro Mechanical Systems.
M. Shikida,
Kazuo Sato,
T. Masuda,
2001
.
Mitsuhiro Shikida,
Mina Okochi,
Hiroyoshi Tsuchiya,
2008
.
M. Shikida,
M. Okochi,
H. Honda,
2014
.
M. Shikida,
2013
.
Mitsuhiro Shikida,
Mina Okochi,
Hiroyoshi Tsuchiya,
2010,
Journal of bioscience and bioengineering.
M. Shikida,
Kazuo Sato,
T. Yoshioka,
1998
.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2019,
Japanese Journal of Applied Physics.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2017
.
M. Shikida,
Kazuo Sato,
T. Hasegawa,
2013
.
M. Shikida,
Kazuo Sato,
G. Kita,
2010
.
M. Shikida,
Y. Mitsuya,
K. Fukuzawa,
2007
.
M. Shikida,
Kazuo Sato,
Takashi Yamashiro,
1999
.
M. Shikida,
Kazuo Sato,
D. Uchikawa,
2000
.
M. Shikida,
Kazuo Sato,
S. Yamashita,
2004
.
Yasuroh Iriye,
Mitsuhiro Shikida,
Kazuo Asaumi,
1998
.
Yasuroh Iriye,
Mitsuhiro Shikida,
Kazuo Asaumi,
1997,
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
Mitsuhiro Shikida,
Daisuke Uchikawa,
M. Shikida,
1998,
MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388).
M. Shikida,
K. Sato,
M. Shikida,
1999,
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
M. Shikida,
K. Sato,
H. Sasaki,
2009,
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
Yasuroh Iriye,
Mitsuhiro Shikida,
Masafumi Hirota,
2007
.
M. Shikida,
Jun Akedo,
Maxim Lebedev,
2003,
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
M. Shikida,
Yasumasa Ito,
K. Nagata,
2014
.
M. Shikida,
Yasumasa Ito,
K. Nagata,
2014
.
M. Shikida,
H. Hida,
K. Nagata,
2013
.
Mitsuhiro Shikida,
Prem Pal,
M. Shikida,
2007
.
A. J. Nijdam,
M. Shikida,
Kazuo Sato,
2001
.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2020,
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2020,
Microsystem Technologies.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2018
.
Mitsuhiro Shikida,
Tsutomu Kawabe,
Miyoko Matsushima,
2017
.
M. Shikida,
T. Kawabe,
M. Matsushima,
2014
.
M. Shikida,
T. Kawabe,
M. Matsushima,
2014,
IEEE SENSORS 2014 Proceedings.
M. Shikida,
T. Kawabe,
M. Matsushima,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
M. Shikida,
T. Kawabe,
M. Matsushima,
2012,
2012 IEEE Sensors.
M. Shikida,
Kazuo Sato,
T. Kawabe,
2010
.
Mitsuhiro Shikida,
Tsutomu Kawabe,
J. Naito,
2009
.
M. Shikida,
Y. Hasegawa,
A. Kato,
2020
.
M. Shikida,
Y. Hasegawa,
Takayuki Yamada,
2017
.
M. Shikida,
Yosuke Niimi,
S. Shibata,
2017
.
M. Shikida,
Yutaka Eto,
S. Shibata,
2013,
2013 IEEE SENSORS.
M. Shikida,
Y. Hasegawa,
T. Yamada,
2016,
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
M. Shikida,
K. Sato,
Han Ji-song,
2002
.
Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition
Mitsuhiro Shikida,
Taeko Ando,
T. Kasai,
2005
.
M. Shikida,
K. Sato,
Xueping Li,
2004,
Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004..
M. Shikida,
K. Sato,
M. Okochi,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
M. Shikida,
K. Sato,
M. Okochi,
2010,
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).
M. Shikida,
K. Sato,
M. Okochi,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
M. Shikida,
K. Sato,
M. Okochi,
2008,
2008 International Symposium on Micro-NanoMechatronics and Human Science.
Mitsuhiro Shikida,
M. Shikida,
Kazuo Sato,
2006
.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2019,
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
M. Shikida,
K. Sato,
T. Yokota,
2009,
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
M. Shikida,
Kazuo Sato,
M. Gosálvez,
2009
.
M. Shikida,
Kazuo Sato,
D. Uchikawa,
2000
.
M. Shikida,
H. Mizuta,
Y. Tsuchiya,
2018,
2018 IEEE Micro Electro Mechanical Systems (MEMS).
M. Shikida,
Kazuo Sato,
K. Asaumi,
2000
.
M. Shikida,
2012
.
M. Shikida,
Kazuo Sato,
Hiroshi Tanaka,
2006
.
M. Shikida,
K. Sato,
K. Inoue,
2004,
Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004..
M. Shikida,
Kazuo Sato,
Hiroshi Tanaka,
2004
.
M. Shikida,
Jeong Il Lee,
K. Sato,
2015
.
M. Shikida,
Kazuo Sato,
2008
.
M. Shikida,
K. Sato,
M. Hirota,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
M. Shikida,
K. Sato,
T. Ando,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
M. Shikida,
K. Sato,
G. Ding,
2006,
2006 IEEE International Symposium on MicroNanoMechanical and Human Science.
M. Shikida,
T. Tsuchiya,
J. Sakata,
2001
.
M. Shikida,
T. Tsuchiya,
J. Amano,
2001
.
M. Shikida,
H. Hida,
M. Gosálvez,
2009,
2009 International Symposium on Micro-NanoMechatronics and Human Science.
M. Shikida,
K. Sato,
M. Gosálvez,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
M. Shikida,
H. Sasaki,
Ken-ichi Nanbara,
2001
.
M. Shikida,
K. Sato,
K. Asaumi,
1998,
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
M. Shikida,
K. Sato,
H. Hida,
2009,
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
M. Shikida,
Y. Hasegawa,
K. Taniguchi,
2020,
Microsystem Technologies.
M. Shikida,
M. Okochi,
H. Honda,
2011
.
M. Shikida,
Yosuke Niimi,
S. Shibata,
2014,
IEEE/LEOS International Conference on Optical MEMS.
M. Shikida,
Y. Hasegawa,
M. Matsushima,
2018,
Journal of Micromechanics and Microengineering.
M. Shikida,
M. Hirota,
Z. Liu,
2017
.
M. Shikida,
Yosuke Niimi,
T. Sugino,
2014,
Microsystem Technologies.
M. Shikida,
Kayo Hamaguchi,
Kazuo Sato,
2012,
Microsystem Technologies.
M. Shikida,
H. Hida,
Kayo Hamaguchi,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
M. Shikida,
K. Sato,
T. Ando,
2005,
IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005.
M. Shikida,
K. Sato,
T. Ando,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
M. Shikida,
K. Sato,
T. Ando,
2004,
Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004..
M. Shikida,
K. Sato,
Xueping Li,
2004,
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
M. Shikida,
M. Okochi,
H. Honda,
2013,
Microsystem Technologies.
M. Shikida,
K. Sato,
T. Yoshioka,
1996,
Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
M. Shikida,
S. Shibata,
P. Kim,
2017
.
M. Shikida,
S. Shibata,
P. Kim,
2016,
Microsystem Technologies.
M. Shikida,
T. Kawabe,
M. Matsushima,
2015,
2015 IEEE SENSORS.
M. Shikida,
S. Shibata,
P. Kim,
2015,
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
M. Shikida,
Y. Hasegawa,
A. Kato,
2020,
Microsystem Technologies.
M. Shikida,
Yosuke Niimi,
S. Shibata,
2015,
Microsystem Technologies.
M. Shikida,
K. Sato,
Han Ji-song,
2005
.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2020,
Microsystem Technologies.
M. Shikida,
K. Sato,
H. Hida,
2013,
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
Mitsuhiro Shikida,
Mina Okochi,
Hiroyuki Honda,
2008,
Lab on a chip.
Development of MEMS Flow and Pressure Sensor Device for Detection of Extravasation at an Early Stage
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2022,
IEEJ Transactions on Electrical and Electronic Engineering.
M. Shikida,
T. Phan,
H. Hida,
2013
.
M. Shikida,
S. Kitamura,
Chikara Miyake,
2014
.
Mitsuhiro Shikida,
Miyoko Matsushima,
Tsutomu Kawabe,
2020
.
Kazuo Sato,
Mitsuhiro Shikida,
Min-Gyu Kim,
2013,
Sensors.
Mitsuhiro Shikida,
Taeko Ando,
Tetsuo Yoshioka,
2000
.
Mitsuhiro Shikida,
Taeko Ando,
M. Shikida,
2006
.
Mitsuhiro Shikida,
J. Naito,
M. Shikida,
2010
.
Mitsuhiro Shikida,
Taeko Ando,
M. Shikida,
2007
.
M. Shikida,
Y. Hasegawa,
K. Taniguchi,
2019,
Microsystem Technologies.
M. Shikida,
M. Shikida,
Y. Kawamura,
1994
.
Mitsuhiro Shikida,
Di Cheng,
M. Shikida,
2006
.
M. Shikida,
Tsubasa Imamura,
K. Sato,
2008
.
M. Shikida,
M. Mikami,
M. Mizoshiri,
2014
.
M. Shikida,
J. Sinko,
N. Ogita,
2012
.
Mitsuhiro Shikida,
Tsutomu Kawabe,
Miyoko Matsushima,
2021,
Japanese Journal of Applied Physics.
Mitsuhiro Shikida,
Tsutomu Kawabe,
Miyoko Matsushima,
2014
.
Kazuo Sato,
Mitsuhiro Shikida,
Takehiko Hasada,
2006
.
Mitsuhiro Shikida,
Seiichi Hata,
Mizue Mizoshiri,
2013,
MHS2013.
M. Shikida,
M. Shikida,
Kazuo Sato,
2005
.
Mitsuhiro Shikida,
Taeko Ando,
T. Kasai,
2005
.
Yasuroh Iriye,
Z. Y. Tan,
M. Shikida,
2007
.
Mitsuhiro Shikida,
Ken-ichi Nanbara,
Tohru Koizumi,
2002
.
M. Shikida,
Y. Goto,
K. Sato,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
Mitsuhiro Shikida,
Prem Pal,
M. Shikida,
2009
.
M. Shikida,
K. Sato,
H. Hida,
2010
.
M. Shikida,
K. Sato,
M. Gosálvez,
2007,
2007 International Symposium on Micro-NanoMechatronics and Human Science.
Miguel A. Gosálvez,
Mitsuhiro Shikida,
Bin Tang,
2010
.
Mitsuhiro Shikida,
E. van Veenendaal,
M. Shikida,
2001
.
M. Shikida,
D. Uchikawa,
Kazuo Sato,
2001
.
Mitsuhiro Shikida,
Kazuo Sato,
Hyunjin Shin,
2014
.
Mitsuhiro Shikida,
M. Shikida,
Koji Asano,
2013,
IEEE Sensors Journal.
M. Shikida,
K. Sato,
K. Asano,
2012,
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
Mitsuhiro Shikida,
M. Shikida,
G. Kita,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
Microfabricated 3D flexible tactile sensor with table-shaped structure for intelligent robot fingers
Mitsuhiro Shikida,
Hirotaka Hida,
M. Shikida,
2010,
2010 International Symposium on Micro-NanoMechatronics and Human Science.
Mitsuhiro Shikida,
G. Kita,
Y. Suzuki,
2010
.
M. Shikida,
K. Sato,
H. Sasaki,
2005,
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..
M. Shikida,
K. Sato,
T. Ando,
2003,
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
M. Shikida,
Kazuo Sato,
M Shikida,
1994
.
Mitsuhiro Shikida,
Takehiko Hasada,
M. Shikida,
2006
.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2016
.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2016,
Microsystem Technologies.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2014
.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2012
.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2010
.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2008
.
M. Shikida,
Y. Mitsuya,
K. Fukuzawa,
2006
.
Mitsuhiro Shikida,
Hikaru Sasaki,
Kazuo Sato,
2006
.
M. Shikida,
K. Sato,
Z. Tan,
2004
.
M. Shikida,
G. Ding,
Xueping Li,
2007
.
M. Shikida,
K. Sato,
Hong Wang,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
M. Shikida,
K. Shimizu,
H. Sasaki,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
Mitsuhiro Shikida,
Miyoko Matsushima,
Tsutomu Kawabe,
2017
.
Mitsuhiro Shikida,
Tsutomu Kawabe,
Miyoko Matsushima,
2021,
Sensors.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2017
.
Kazuo Sato,
Mitsuhiro Shikida,
Satoshi Iwai,
2012
.
Mitsuhiro Shikida,
Mina Okochi,
Hiroyuki Honda,
2008
.
M. Shikida,
2000
.
M. Shikida,
M. Okochi,
R. Ghodssi,
2008
.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2013
.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2013,
Microsystem Technologies.
M. Shikida,
K. Fukuzawa,
Hedong Zhang,
2012,
Tribology Letters.
M. Shikida,
Y. Mitsuya,
K. Fukuzawa,
2006
.
M. Shikida,
K. Nakajima,
K. Kato,
2001,
Journal of microscopy.
Hiroshi Ito,
Mitsuhiro Shikida,
M. Shikida,
2006
.
M. Shikida,
K. Imaeda,
K. Bessho,
2016
.
M. Shikida,
K. Imaeda,
K. Bessho,
2015,
Microsystem Technologies.
M. Shikida,
K. Shimizu,
H. Sasaki,
2010,
Biomedical microdevices.
M. Shikida,
Y. Hasegawa,
T. Kawabe,
2024,
IEEJ Transactions on Electrical and Electronic Engineering.
Mitsuhiro Shikida,
Taeko Ando,
M. Shikida,
2001
.
Kazuo Sato,
Mitsuhiro Shikida,
Kazuhiro Yoshikawa,
2013
.
Mitsuhiro Shikida,
Satoshi Iwai,
Kazuhiro Yoshikawa,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
M. Shikida,
T. Yokota,
S. Ukai,
2010
.
Mitsuhiro Shikida,
M. Shikida,
K. Sato,
1998,
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
M. Shikida,
Xueping Li,
T. Ando,
2005
.