M. Ward

发表

A capacitive tactile sensor array for surface texture discrimination

H. B. Muhammad, M. Carrozza, C. Recchiuto, 2011 .

Bio-hybrid tactile sensor for the study of the role of mechanoreceptors in human tactile perception

C. Anthony, M. Ward, D. Cheneler, 2012 .

Development of a Biomimetic MEMS based Capacitive Tactile Sensor

H. B. Muhammad, M. Carrozza, C. Oddo, 2009 .

Bioactive polycrystalline silicon

M. Ward, L. Canham, C. Reeves, 1996 .

The creep behaviour of the microfabricated silicon diaphragms at 900 °C

Juan Ren, M. Ward, P. Kinnell, 2010 .

Performance limitations of surface-machined accelerometers fabricated in polysilicon gate material

M. Ward, D. King, A. Hodge, 1995 .

Micro T-mixer as a rapid mixing micromixer

M. Ward, C. Wharton, Seck Hoe Wong, 2004 .

A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers

M. Ward, P. Docker, A. Cooper, 2005 .

Highly Flexible SU-8 Microstructures

M. Ward, J. Spratley, P. Hall, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

The Open University ’ s repository of research publications and other research outputs Characteristics and durability of fluoropolymer thin films

S. Evans, M. Adams, M. Ward, 2016 .

Characteristics and durability of fluoropolymer thin films

S. Evans, M. Adams, M. Ward, 2011 .

Tunable response nano-mechanical beam resonator

M. Ward, T. Kemp, 2005 .

Electromechanical Model for a Single Port Nano-Mechancial Beam Resonator

M. Ward, I. Jones, P. Docker, 2005 .

Fabrication and analysis of cylindrical resin AFM microcantilevers.

M. Ward, D. Hutchins, D. Billson, 2011, Ultramicroscopy.

Physical characterisation of selective stress coupling for resonant pressure sensors

M. Ward, P. Kinnell, R. Craddock, 2004 .

Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

Lucia Beccai, Michael C. L. Ward, Maria Chiara Carrozza, 2011 .

Silicon as an Active Biomaterial

Michael C. L. Ward, Leigh T. Canham, T. I. Cox, 1996 .

Simulation Studies of Plasmon Enhanced Evanescent Near-Field Optical Lithography

M. Ward, P. Docker, B. Sefa-Ntiri, 2005 .

Stress-induced curvature of focused ion beam fabricated microcantilevers

C. Anthony, M. Ward, D. Cheneler, 2008 .

Principles of a micro squeeze flow rheometer for the analysis of extremely small volumes of liquid

M. Adams, M. Ward, D. Cheneler, 2011 .

Flexible SU-8 microstructures for neural implant design

M. Ward, J. Spratley, P. Hall, 2008 .

Impact of Manufacturing Variation on the Performance of Coupled Micro Resonator Array for Mass Detection Sensor

C. Anthony, M. Ward, Xueyong Wei, 2009 .

The development of a novel Bio-MEMS filtration chip for the separation of specific cells in fluid suspension

M. Ward, P. Docker, M. Prince, 2007, Proceedings of the Institution of Mechanical Engineers. Part H, Journal of engineering in medicine.

On the calibration of rectangular atomic force microscope cantilevers modified by particle attachment and lamination

Zhibing Zhang, M. Adams, M. Ward, 2010 .

pH-dependent adsorption of Au nanoparticles on chemically modified Si3N4 MEMS devices

S. Evans, M. Ward, P. Docker, 2009 .

Growth of iron, nickel, and permalloy thin films by MOCVD for use in magnetoresistive sensors

I. R. Harris, N. A. Smith, M. Ward, 1997 .

Power output and efficiency of beta-emitting microspheres

M. Ward, D. Cheneler, 2015 .

Application of colloid probe atomic force microscopy to the adhesion of thin films of viscous and viscoelastic silicone fluids.

Zhibing Zhang, M. Adams, M. Ward, 2011, Langmuir : the ACS journal of surfaces and colloids.

Investigation of mixing in a cross-shaped micromixer with static mixing elements for reaction kinetics studies

Michael C. L. Ward, M. Ward, C. Wharton, 2003 .

Dynamic simulation of a resonant MEMS magnetometer in Simulink

Michael C. L. Ward, Zaki Izham, M. Ward, 2004 .

Characterization of a micro-engineered selective strain-coupling structure using Raman spectroscopy

M. Ward, P. Kinnell, R. Craddock, 2005 .

Measurement of dynamic properties of small volumes of fluid using MEMS

Zhibing Zhang, M. Adams, M. Ward, 2008 .

Bending characteristics of SU-8

Michael C. L. Ward, M. Ward, J.P.F. Spratley, 2007 .

The Development of Safety Cases for an Autonomous Vehicle: A Comparative Study on Different Methods

Junfeng Yang, Michael C. L. Ward, Jahangir Akhtar, 2017, ICVS 2017.

Micro squeeze flow rheometer for high frequency analysis of nano-litre volumes of viscoelastic fluid

M. Adams, M. Ward, D. Cheneler, 2011 .

Nonlinear Dynamics of a Periodically Driven Duffing Resonator Coupled to a Van der Pol Oscillator

Michael C. L. Ward, Xueyong Wei, Michel F. Randrianandrasana, 2011 .

The application of interference fits for overcoming limitations in clamping methodologies for cryo-cooling first crystal configurations in x-ray monochromators

M. Ward, P. Docker, L. Chapon, 2017 .

Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing

Michael C. L. Ward, M E McNie, Js Burdess, 1998 .

Active Thermal Sensor for Improved Distributed Temperature Sensing in Haptic Arrays

Michael Ward, David Cheneler, M. Ward, 2018, J. Sensors.

Tool-less manufacture: digital fabrication, 3D printing and the third industrial revolution

Michael C. L. Ward, M. Ward, 2015 .

A dry single-step process for the manufacture of released MEMS structures

Michael C. L. Ward, P. T. Docker, Peter Kinnell, 2003 .