J. Greschner

Micromachined silicon sensors for scanning force microscopy

O. Wolter, T. Bayer, J. Greschner, 1991 .

Ultrathin membrane masks for electron projection lithography

Carey W. Thiel, C. Robinson, T. Bayer, 2004 .

Electron-beam proximity printing: a new high-speed lithography method for submicron structures

J. Greschner, H. Bohlen, J. Keyser, 1982 .

Scanning force microscopy with micromachined silicon sensors

O. Wolter, J. Greschner, R. Kassing, 1991 .

Magnetic force microscopy with batch‐fabricated force sensors

O. Wolter, T. Bayer, J. Greschner, 1991 .

Low temperature etching of Si in high density plasma using SF6/O2

Johann W. Bartha, J. Greschner, J. Bartha, 1995 .

Batch fabricated sensors for magnetic force microscopy

O. Wolter, T. Bayer, J. Greschner, 1990 .

Recent CD AFM probe developments for sub-45 nm technology nodes

Gregory A. Dahlen, Hao-Chih Liu, Jason R. Osborne, 2008, SPIE Advanced Lithography.