E. Spiller
发表
W. H. Benner,
S. Marchesini,
H. Chapman,
2007,
Nano letters.
W. H. Benner,
K. Hodgson,
R. London,
2006,
physics/0610044.
E. Spiller,
E. Bassous,
R. Feder,
1975
.
E. Spiller,
W. Martienssen,
1964
.
Eberhard Spiller,
E. Spiller,
1949,
Nature.
E. Spiller,
D. Stearns,
P. Mirkarimi,
2004
.
E. Spiller,
A. Segmüller,
J. Rife,
1980
.
E. Spiller,
1989
.
E. Spiller,
1972
.
E. Spiller,
A. Segmüller,
R. Haelbich,
1979
.
W. M. Clift,
S. Bajt,
E. Spiller,
2002
.
E. Spiller,
L. Golub,
M. Herant,
1990,
Nature.
R. Rosner,
E. Spiller,
H. Zirin,
1993
.
E. Spiller,
C. Evans,
T. Lucatorto,
1996
.
Richard A. London,
Anton Barty,
Sébastien Boutet,
2007,
Nature.
S. Marchesini,
H. Chapman,
M. Bogan,
2007,
Applied optics.
E. Spiller,
1988
.
E. Spiller,
2000
.
E. Spiller,
1998
.
Eberhard Spiller,
E. Spiller,
1994,
Optical Society of America Annual Meeting.
E. Spiller,
E. Gullikson,
John S. Taylor,
2007
.
Martin C. Weisskopf,
Eberhard Spiller,
J. Patrick Henry,
1982
.
E. Spiller,
R. Feder,
J. Topalian,
1977
.
E. Spiller,
T. Barbee,
J. Folta,
2022
.
R. E. Tibbetts,
Eberhard Spiller,
Janusz S. Wilczynski,
1982
.
E. Spiller,
D. Stearns,
L. Golub,
1992
.
E. Spiller,
1974
.
E. Spiller,
1984,
Applied optics.
R Tatchyn,
R J Bartlett,
E. Spiller,
1984,
Applied optics.
Regina Soufli,
Donald W. Phillion,
Russell M. Hudyma,
2001
.
E. Spiller,
I. T. Watson,
1993
.
E. Spiller,
F. Bijkerk,
E. Louis,
1997
.
E. Spiller,
1971,
Applied optics.
E. Spiller,
M. Pomerantz,
J. Slonczewski,
1986
.
R. London,
S. Marchesini,
H. Chapman,
2008
.
Eberhard Spiller,
E. Spiller,
1972
.
E. Spiller,
F. Bijkerk,
E. Louis,
1997
.
E. Spiller,
E Spiller,
1976,
Applied optics.
E. Spiller,
A. Broers,
C. Chi,
1980
.
D. Sayre,
E. Spiller,
D. Eastman,
1976,
Science.
Kenneth A. Goldberg,
Regina Soufli,
Patrick P. Naulleau,
2002
.
E. Spiller,
R. Feder,
J. Topalian,
1977,
Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology.
E. Spiller,
1965
.
Ivan K. Schuller,
Eberhard Spiller,
Y. Lepetre,
1986
.
E. Spiller,
F. Himpsel,
L. Terminello,
1990
.
Sherry L. Baker,
Patrick P. Naulleau,
Farhad Salmassi,
2007
.
The first use of transmission gratings for measurements of optical constants in the soft X-ray range
E. Spiller,
A. Hawryluk,
R. Bartlett,
1982
.
Eberhard Spiller,
E. Spiller,
1988
.
M. J. Pivovaroff,
Regina Soufli,
Mónica Fernández-Perea,
2016
.
E. Spiller,
M. Pomerantz,
J. Slonczewski,
1987
.
Eberhard Spiller,
E. Spiller,
1985,
Optics & Photonics.
Eberhard Spiller,
E. Spiller,
1985
.
S. Grantham,
S. Bajt,
H. N. Chapman,
2007,
SPIE Optics + Optoelectronics.
Regina Soufli,
William Podgorski,
Leon Golub,
2012
.
R Feder,
D Sayre,
J Kirz,
1977,
Ultramicroscopy.
Eberhard Spiller,
E. Spiller,
2004,
SPIE Optics + Photonics.
Leon Golub,
Eberhard Spiller,
Kurt Grebe,
1989,
Optics & Photonics.
E. Spiller,
1980
.
Warren David Grobman,
Eberhard Spiller,
Ralph Feder,
1976
.
E. Spiller,
I. Lindau,
R. Tatchyn,
1984
.
E. Spiller,
R. Tatchyn,
I. Lindau,
1983
.
E. Spiller,
A. Segmüller,
1974
.
Regina Soufli,
Jeff C. Robinson,
Eberhard Spiller,
2007,
Applied optics.
Kenneth A. Goldberg,
Sherry L. Baker,
Patrick P. Naulleau,
2003,
SPIE Advanced Lithography.
Pei-yang Yan,
Richard H. Stulen,
Donald W. Sweeney,
2002,
SPIE Advanced Lithography.
Pei-yang Yan,
Richard H. Stulen,
Donald W. Sweeney,
2001,
SPIE Optics + Photonics.
Eric M. Gullikson,
Marco Wedowski,
James A. Folta,
1999,
Advanced Lithography.
Sherry L. Baker,
Eric M. Gullikson,
James H. Underwood,
1998,
Advanced Lithography.
Saša Bajt,
James A. Folta,
Claude Montcalm,
1998,
Advanced Lithography.
E. Spiller,
E Spiller,
1984,
Applied optics.
Leon Golub,
Eberhard Spiller,
George Nystrom,
1985,
Optics & Photonics.
Martin C. Weisskopf,
Eberhard Spiller,
J. Patrick Henry,
1982,
Other Conferences.
Alan E. Rosenbluth,
Eberhard Spiller,
E. Spiller,
1985,
Optics & Photonics.
Richard A. London,
Anton Barty,
Sébastien Boutet,
2006
.
W. Miles Clift,
Saša Bajt,
Jennifer B. Alameda,
2001,
SPIE Optics + Photonics.
Michael Krumrey,
Eberhard Spiller,
Daniel G. Stearns,
1993
.
E. Spiller,
2008
.
Regina Soufli,
Stanley Mrowka,
Claude Montcalm,
2001,
SPIE Advanced Lithography.
J. Kirz,
D. Sayre,
E. Spiller,
1976
.
Sherry L. Baker,
Charles S. Tarrio,
Eberhard Spiller,
1999,
Optics & Photonics.
E. Spiller,
1994
.
Richard H. Stulen,
Donald W. Sweeney,
Kenneth A. Goldberg,
2001
.
Libor Juha,
Elke Plönjes,
Carl Caleman,
2006,
Physical review letters.
E. Spiller,
R. Haelbich,
A. Segmuller,
1980
.
J. Chalupský,
L. Juha,
V. Hájková,
2009,
Optics + Optoelectronics.
Sherry L. Baker,
Eric M. Gullikson,
Paul B. Mirkarimi,
2004
.
R Feder,
E. Spiller,
J. Sedat,
1977,
Science.
E. Spiller,
M. Hatzakis,
R. Feder,
1979
.
Eric M. Gullikson,
Saša Bajt,
Patrick A. Kearney,
2000,
Advanced Lithography.
Marco Wedowski,
Claude Montcalm,
Eberhard Spiller,
2002,
Applied optics.
R Feder,
D Sayre,
J Kirz,
1977,
Science.
E. Spiller,
2015
.
Eberhard Spiller,
E. Spiller,
2005,
SPIE Optics + Photonics.
Patrick P. Naulleau,
Farhad Salmassi,
Eric M. Gullikson,
2004
.
Eric M. Gullikson,
Marco Wedowski,
James A. Folta,
2001
.
E. Spiller,
1990,
Applied optics.
Eberhard Spiller,
E. Spiller,
1993,
IBM J. Res. Dev..
Jeff C. Robinson,
S. Hau-Riege,
E. Spiller,
2016,
Optics express.
Sherry L. Baker,
Farhad Salmassi,
Paul B. Mirkarimi,
2005
.
Sherry L. Baker,
Paul B. Mirkarimi,
Eberhard Spiller,
2001
.
Kenneth A. Goldberg,
Sherry L. Baker,
Patrick P. Naulleau,
1999,
Advanced Lithography.
E. Spiller,
W. Martienssen,
1966
.
Eberhard Spiller,
Ralph Feder,
J. Topalian,
1975
.
Eberhard Spiller,
E. Spiller,
1992,
Optics & Photonics.
D. Sayre,
E. Spiller,
R. Feder,
1979
.
E. Spiller,
W. Martienssen,
E. Spiller,
1966
.