D. Stearns

发表

Double pass amplification of laser radiation at 131 Å

N. Ceglio, D. Gaines, D. Stearns, 1989 .

Nonspecular x-ray scattering in a multilayer-coated imaging system

D. Gaines, D. Stearns, D. Sweeney, 1998 .

Thermally induced structural modification of Mo‐Si multilayers

N. Ceglio, D. Stearns, M. Stearns, 1990 .

Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers

S. Bajt, D. Stearns, P. Kearney, 2001 .

Extended X-Ray Absorption Fine Structure

D. G. Stearns, M. B. Stearns, D. Stearns, 1986 .

Localized defects in multilayer coatings

E. Spiller, D. Stearns, P. Mirkarimi, 2004 .

High‐resolution electron microscopy study of x‐ray multilayer structures

N. Ceglio, D. Stearns, A. Hawryluk, 1987 .

Optimization of Growth Conditions of Vapor Deposited Mo/Si Multilayers

D. Stearns, M. Stearns, C. Chang, 1992, Physics of X-Ray Multilayer Structures.

Fabrication of high‐reflectance Mo–Si multilayer mirrors by planar‐magnetron sputtering

R. S. Rosen, D. Stearns, S. Vernon, 1991 .

Practical approach for modeling extreme ultraviolet lithography mask defects

D. Stearns, D. Sweeney, E. Gullikson, 2002 .

Multilayer mirror technology for soft-x-ray projection lithography.

R S Rosen, R. S. Rosen, D. Stearns, 1993, Applied optics.

The scattering of x rays from nonideal multilayer structures

Daniel G. Stearns, D. Stearns, 1989 .

SOFT X-RAY LASER CAVITIES

P. Mueller, N. Ceglio, D. Stearns, 1986 .

Imaging performance of multilayer x-ray mirrors

E. Spiller, D. Stearns, L. Golub, 1992 .

Kinetics of interlayer growth and changes in residual elastic strain during annealing of Mo/Si multilayers

M. E. Kassner, R. S. Rosen, D. Stearns, 1993 .

Chirped multilayer coatings for increased x-ray throughput.

R S Rosen, R. S. Rosen, D. Stearns, 1993, Optics letters.

Ultrasmooth, Conducting Films Composed of Mo/Si Multilayers

D. Stearns, M. Wall, S. Baker, 1995 .

Electro-optic sampling of ultrashort high voltage pulses

D. Stearns, 1989 .

X‐ray framing camera for picosecond imaging of laser‐produced plasmas

O. Landen, D. Stearns, B. Cook, 1989 .

Development of an x-ray framing camera

D. Stearns, R. Hanks, J. Wiedwald, 1986 .

Image degradation from surface scatter in EUV optics

Donald W. Sweeney, D. P. Gaines, D. G. Stearns, 1996 .

Approaches to ultrafast neutron detectors

D. Stearns, M. Cable, G. Mourou, 1985 .

Ion-assisted sputter deposition of molybdenum-silicon multilayers.

R S Rosen, R. S. Rosen, D. Stearns, 1993, Applied optics.

Response of charge-coupled devices to direct electron bombardment

J. D. Wiedwald, D. G. Stearns, D. Stearns, 1989 .

Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths.

N. Ceglio, D. Stearns, A. Hawryluk, 1988, Optics letters.

Broadening of extended X-ray absorption fine structure arising from the finite lifetime of the K hole

D. Stearns, 1984 .

X‐ray scattering from interfacial roughness in multilayer structures

Daniel G. Stearns, D. Stearns, 1992 .

Measurement of the temporal progression of scour in a pool‐riffle sequence in a gravel bed stream using an electronic scour monitor

D. Stearns, S. Burges, P. DeVries, 2001 .

Multilayer x‐ray mirrors: Interfacial roughness, scattering, and image quality

Michael Krumrey, Eberhard Spiller, Daniel G. Stearns, 1993 .

High-temperature stability multilayers for extreme-ultraviolet condenser optics.

Sasa Bajt, S. Bajt, D. Stearns, 2005, Applied optics.

High-performance multilayer mirrors for soft x-ray projection lithography

Stephen P. Vernon, Daniel G. Stearns, R. S. Rosen, 1992, Optics & Photonics.

Early photoluminescence decay in a-Si:H

D. Stearns, 1984 .

Multipass amplification of soft x-rays in a laser cavity.

J E Trebes, N. Ceglio, D. Stearns, 1988, Optics letters.

Technique employing gold nanospheres to study defect evolution in thin films

D. Stearns, P. Mirkarimi, S. Baker, 2001 .

Developing a viable multilayer coating process for extreme ultraviolet lithography reticles

Sherry L. Baker, Eric M. Gullikson, Paul B. Mirkarimi, 2004 .

Method for repairing Mo/Si multilayer thin film phase defects in reticles for extreme ultraviolet lithography

Donald W. Sweeney, Sherry L. Baker, Eric M. Gullikson, 2001 .

Imaging x‐ray multilayer structures using cross‐sectional high resolution electron microscopy

D. Stearns, David J. Smith, Yuan Cheng, 1992 .

Applications of microfabrication technology to x‐ray laser cavities

Natale M. Ceglio, A. M. Hawryluk, Daniel G. Stearns, 1988 .

Nonspecular scattering from extreme ultraviolet multilayer coatings

D. Stearns, E. Gullikson, 2000 .

Advancing the ion beam thin film planarization process for the smoothing of substrate particles

Sherry L. Baker, Farhad Salmassi, Paul B. Mirkarimi, 2005 .

An ion-assisted Mo-Si deposition process for planarizing reticle substrates for extreme ultraviolet lithography

Sherry L. Baker, Paul B. Mirkarimi, Eberhard Spiller, 2001 .

Investigating the growth of localized defects in thin films using gold nanospheres

Paul B. Mirkarimi, D. G. Stearns, D. Stearns, 2000 .

EUV scattering and flare of 10X projection cameras

Kenneth A. Goldberg, Sherry L. Baker, Patrick P. Naulleau, 1999, Advanced Lithography.

Hydrodynamic evolution of picosecond laser plasmas

Daniel G. Stearns, Otto L. Landen, W. Edward Alley, 1991, Photonics West - Lasers and Applications in Science and Engineering.

Development of a novel soft X-ray source for laboratory applications☆

D. Stearns, 1986 .

Stochastic model for thin film growth and erosion

Daniel G. Stearns, D. Stearns, 1993 .

Layer formation in CuNi/C x-ray optics

D. Stearns, A. Jankowski, 1990 .