S. Montague

High-G MEMS integrated accelerometer

Brady R. Davies, Stephen Montague, James H. Smith, 1997, Smart Structures.

Embedded micromechanical devices for the monolithic integration of MEMS with CMOS

Paul J. McWhorter, Jeffry J. Sniegowski, Stephen Montague, 1995, Proceedings of International Electron Devices Meeting.

Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS)

Rodgers, James J. Allen, S. Montague, 1999 .

Electron and hole trapping in doped oxides

S. Montague, D. Fleetwood, P. Winokur, 1995 .

An integrated microelectromechanical resonant output gyroscope

S. Montague, R. Howe, S. Montague, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

Vacuum Packaging for Microelectromechanical Systems (MEMS)

R. Howe, M. Schmidt, S. Montague, 2002 .

Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

Jeffry J. Sniegowski, Stephen Montague, James H. Smith, 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

A vacuum packaged surface micromachined resonant accelerometer

Ashwin A. Seshia, T. A. Roessig, Roger T. Howe, 2002 .

Micromechanical pierce oscillators for resonant sensing applications

Ashwin A. Seshia, Roger T. Howe, S. Montague, 2002 .