Y. Hayashi
发表
Y. Hayashi,
K. Oyama,
S. Takahashi,
1991,
International Electron Devices Meeting 1991 [Technical Digest].
Y. Hayashi,
S. Takahashi,
T. Kunio,
1995,
1995 Symposium on VLSI Technology. Digest of Technical Papers.
Y. Hayashi,
S. Takahashi,
T. Kunio,
1992,
Proceedings 1992 IEEE Multi-Chip Module Conference MCMC-92.
Y. Hayashi,
T. Tatsumi,
N. Kasai,
1997,
International Electron Devices Meeting. IEDM Technical Digest.
Y. Hayashi,
H. Shirai,
T. Hase,
2010,
2010 International Electron Devices Meeting.
Y. Hayashi,
Y. Hayashi,
2002,
Proceedings of the IEEE 2002 International Interconnect Technology Conference (Cat. No.02EX519).
Y. Hayashi,
2009
.
T. Takeuchi,
M. Tada,
N. Inoue,
2008,
IEEE Transactions on Semiconductor Manufacturing.
M. Tada,
Y. Hayashi,
N. Furutake,
2007,
IEEE Transactions on Electron Devices.
T. Takeuchi,
M. Tada,
Y. Hayashi,
2007,
IEEE Transactions on Electron Devices.
M. Tada,
Y. Hayashi,
M. Tagami,
2006,
IEEE Transactions on Semiconductor Manufacturing.
T. Takeuchi,
M. Tada,
N. Inoue,
2006,
IEEE Transactions on Electron Devices.
Y. Hayashi,
T. Onodera,
J. Kawahara,
1999,
1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325).
M. Hane,
N. Inoue,
Y. Hayashi,
2011,
2011 International Electron Devices Meeting.
Y. Hayashi,
N. Inoue,
N. Furutake,
2011,
2011 Symposium on VLSI Technology - Digest of Technical Papers.
Y. Hayashi,
T. Onodera,
S. Saito,
2009,
IEEE Transactions on Electron Devices.
Y. Hayashi,
N. Inoue,
2001
.
Yoshihiro Hayashi,
M. Tagami,
F. Ito,
2004
.
A. Uedono,
Y. Hayashi,
K. Eguchi,
2009
.
Y. Hayashi,
2008
.
Y. Hayashi,
N. Inoue,
2004
.
Y. Hayashi,
N. Inoue,
N. Furutake,
2005,
IEEE Transactions on Electron Devices.
Y. Hayashi,
K. Hijioka,
N. Inoue,
2009
.
Y. Hayashi,
H. Shibata,
M. Wada,
2013,
IEEE Transactions on Electron Devices.
Y. Hayashi,
H. Shibata,
M. Wada,
2012,
IEEE Transactions on Electron Devices.
Y. Hayashi,
H. Shibata,
M. Wada,
2010,
2010 IEEE International Interconnect Technology Conference.
Y. Hayashi,
H. Shibata,
M. Wada,
2009,
2009 IEEE International Interconnect Technology Conference.
T. Kikkawa,
Y. Hayashi,
A. Ishikawa,
2007
.
T. Kikkawa,
Y. Hayashi,
J. Kawahara,
2007
.
T. Kikkawa,
Y. Hayashi,
J. Kawahara,
2006
.
T. Kikkawa,
Y. Hayashi,
J. Kawahara,
2004,
Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729).
M. Tada,
Y. Hayashi,
H. Ohtake,
2004,
IEEE Transactions on Electron Devices.
Y. Hayashi,
T. Onodera,
N. Sasaki,
1999,
Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247).
Y. Hayashi,
T. Onodera,
S. Saito,
2002,
Digest. International Electron Devices Meeting,.
Y. Hayashi,
T. Onodera,
A. Furuya,
1999,
International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318).
Yoshihiro Hayashi,
Akira Tanabe,
Ken'ichiro Hijioka,
2011,
IEEE Journal of Solid-State Circuits.
Y. Hayashi,
A. Tanabe,
K. Hijioka,
2010,
2010 Symposium on VLSI Circuits.
Y. Hayashi,
M. Furumiya,
N. Inoue,
2007,
2007 IEEE International Electron Devices Meeting.
Y. Hayashi,
T. Onodera,
A. Tanabe,
2006,
2006 International Interconnect Technology Conference.
Y. Hayashi,
T. Onodera,
F. Ito,
2012
.
Y. Hayashi,
M. Furumiya,
N. Inoue,
2007
.
Y. Hayashi,
M. Sekine,
F. Ito,
2005,
IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest..
Y. Hayashi,
N. Inoue,
N. Furutake,
2010
.
Y. Hayashi,
H. Wakabayashi,
A. Kubo,
1999
.
Y. Hayashi,
T. Onodera,
S. Saito,
2003,
Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No.03TH8695).
Y. Hayashi,
N. Inoue,
I. Kume,
2011
.
Y. Hayashi,
T. Onodera,
S. Saito,
2005,
IEEE Transactions on Semiconductor Manufacturing.
Plasma-Etching Technology With In Situ Etched-Surface Modification for Highly Reliable Low- /Cu Dual
Y. Hayashi,
T. Onodera,
S. Saito,
2005
.
Y. Hayashi,
N. Inoue,
I. Kume,
2010
.
A. Uedono,
Y. Hayashi,
K. Eguchi,
2009,
2009 IEEE International Interconnect Technology Conference.
Y. Hayashi,
M. Tagami,
2010
.
Y. Hayashi,
2009
.
Y. Hayashi,
N. Inoue,
I. Kume,
2011
.
Y. Hayashi,
T. Ogura,
M. Tada,
2002
.
Y. Hayashi,
S. Saito,
N. Furutake,
2005
.
Y. Hayashi,
T. Onodera,
T. Usami,
2000,
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).
Y. Hayashi,
T. Kunio,
T. Matsuki,
1996,
International Electron Devices Meeting. Technical Digest.
Y. Hayashi,
T. Onodera,
S. Saito,
2003,
IEEE International Electron Devices Meeting 2003.
Hiroki Koike,
Yoshihiro Hayashi,
J. Yamada,
1998,
1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216).
Y. Hayashi,
N. Inoue,
T. Takeuchi,
2002
.
Y. Hayashi,
N. Inoue,
Y. Maejima,
1997,
International Electron Devices Meeting. IEDM Technical Digest.
Yoshihiro Hayashi,
Munehiro Tada,
N. Furutake,
2007
.
Yoshihiro Hayashi,
Akira Tanabe,
H. Sunamura,
2017,
IEEE Transactions on Electron Devices.
Y. Hayashi,
N. Inoue,
N. Furutake,
2005
.
Y. Hayashi,
N. Inoue,
T. Nakura,
2003
.
Y. Hayashi,
T. Kunio,
S. Kobayashi,
1997
.
Yoshihiro Hayashi,
Masayoshi Tagami,
Fuminori Ito,
2013,
IEEE Transactions on Components, Packaging and Manufacturing Technology.
Y. Hayashi,
S. Ohnishi,
K. Nakajima,
1997
.
S. Saito,
M. Hane,
Y. Hayashi,
2013,
2013 Symposium on VLSI Technology.
M. Hane,
Y. Hayashi,
H. Sunamura,
2012,
2012 International Electron Devices Meeting.
Y. Hayashi,
S. Takahashi,
M. Edahiro,
1998,
International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217).
Y. Hayashi,
N. Inoue,
N. Furutake,
2009,
2009 IEEE International Interconnect Technology Conference.
Evaluation of CVD/PVD multilayered seed for electrochemical deposition of Cu-damascene interconnects
Y. Hayashi,
K. Kikuta,
A. Furuya,
2002
.
Y. Hayashi,
Naoya Inoue,
Y. Hayashi,
2000,
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).
Yoshihiro Hayashi,
Akira Tanabe,
Ken'ichiro Hijioka,
2009,
2009 IEEE Radio Frequency Integrated Circuits Symposium.