Taian Fan

Impact of flare on source mask optimization in EUVL for 7nm technology node

Yayi Wei, Lisong Dong, Thuc Dam, 2020, Advanced Lithography.

Urban underground infrastructure mapping and assessment

Dan Orfeo, Dryver Huston, Jonathan Razinger, 2017, Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

Probability prediction model for bridging defects induced by combined influences from lithography and etch variations

Yayi Wei, Lisong Dong, Libin Zhang, 2019, Journal of Micro/Nanolithography, MEMS, and MOEMS.

Rigorous EUV absorber model for the mask modeling with deep learning techniques

Yayi Wei, Pengpeng Yuan, Taian Fan, 2021, Journal of Micro/Nanopatterning, Materials, and Metrology.

Zero-group-velocity propagation of electromagnetic wave through nanomaterial

Taian Fan, 2016 .

Compressive sensing method for EUV source optimization using different bases

Yayi Wei, Lisong Dong, Jiaxin Lin, 2020, Advanced Lithography.

Learning-based compressive sensing method for EUV lithographic source optimization.

Yayi Wei, Lisong Dong, Tianchun Ye, 2019, Optics express.