Rongbo Zhao

Impact of flare on source mask optimization in EUVL for 7nm technology node

Yayi Wei, Lisong Dong, Thuc Dam, 2020, Advanced Lithography.

Analysis and modulation of aberration in an extreme ultraviolet lithography projector via rigorous simulation and a back propagation neural network.

Yayi Wei, Lisong Dong, Xiaojing Su, 2020, Applied optics.

Aberration optimization in an extreme ultraviolet lithography projector via a BP neural network and simulated annealing algorithm.

Yayi Wei, Lisong Dong, Rui Chen, 2021, Applied optics.

Inverse kinematic solution of 6R robot manipulators based on screw theory and the Paden–Kahan subproblem

Yong Guan, Guohui Wang, Zhenzhou Shao, 2018, International Journal of Advanced Robotic Systems.

Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

Xiangming He, Rongbo Zhao, Hong Xu, 2023, ACS omega.

Critical dimension prediction of metal oxide nanoparticle photoresists for electron beam lithography using a recurrent neural network.

Xiangming He, Rongbo Zhao, Hong Xu, 2023, Nanoscale.