M. Caymax
发表
E. Rosseel,
S. Decoutere,
F. Vleugels,
2000,
Proceedings of the 2000 BIPOLAR/BiCMOS Circuits and Technology Meeting (Cat. No.00CH37124).
C. Detavernier,
M. Caymax,
S. V. D. Berghe,
2011
.
A. Stesmans,
R. Loo,
M. Caymax,
2006,
2009 Symposium on VLSI Technology.
A. Hikavyy,
C. Merckling,
N. Waldron,
2011,
2011 International Electron Devices Meeting.
R. Loo,
M. Caymax,
T. Vandeweyer,
2008,
2008 IEEE International Electron Devices Meeting.
M. Caymax,
B. Beckhoff,
S. Sioncke,
2011
.
C. Merckling,
M. Caymax,
M. Heyns,
2010,
IEEE Electron Device Letters.
C. Merckling,
R. Loo,
M. Caymax,
2009,
2009 IEEE International Electron Devices Meeting (IEDM).
K. Opsomer,
L. Ragnarsson,
B. Kaczer,
2006,
2006 International Electron Devices Meeting.
B. Douhard,
O. Richard,
H. Bender,
2013
.
K. Barla,
A. Thean,
N. Collaert,
2015
.
C. Merckling,
N. Waldron,
M. Caymax,
2014
.
K. Barla,
A. Thean,
N. Collaert,
2014
.
M. Caymax,
M. Heyns,
M. Meuris,
2006
.
G. Wang,
O. Richard,
H. Bender,
2010
.
C. Merckling,
J. Kwo,
M. Caymax,
2011
.
Marc Heyns,
Kristin De Meyer,
Marc Meuris,
2011
.
O. Richard,
H. Bender,
N. Waldron,
2011
.
G. Wang,
O. Richard,
H. Bender,
2012
.
Naoto Horiguchi,
Geert Hellings,
Niamh Waldron,
2012
.
H. Bender,
N. Waldron,
M. Caymax,
2010
.
S. De Gendt,
L. Pantisano,
A. Kerber,
2003,
IEEE International Electron Devices Meeting 2003.
K. Barla,
G. Pourtois,
I. Radu,
2018,
Nanotechnology.
H. Bender,
G. Pourtois,
M. Caymax,
2020
.
P. Fiorini,
L. Hermans,
S. Sedky,
1998,
IEEE Electron Device Letters.
Sherif Sedky,
Matty Caymax,
Paolo Fiorini,
1998
.
M. Caymax,
S. Mantl,
J. Schubert,
2006
.
Jürgen Schubert,
Andre Stesmans,
Hugo Bender,
2005
.
Strain relaxation of pseudomorphic Si 1˛x Ge x /SiÑ100Ö heterostructures after Si + ion implantation
B. Holländer,
R. Loo,
M. Caymax,
2004
.
R. Rooyackers,
N. Collaert,
S. Biesemans,
2005,
Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005..
Marc Heyns,
Marc Meuris,
Geoffrey Pourtois,
2008
.
N. Horiguchi,
A. Thean,
C. Merckling,
2012,
2012 International Silicon-Germanium Technology and Device Meeting (ISTDM).
A. Hikavyy,
A. De Keersgieter,
O. Richard,
2012,
2012 International Electron Devices Meeting.
Aaron Thean,
Nadine Collaert,
Laura Nyns,
2013
.
B. Kaczer,
G. Hellings,
L. Witters,
2012,
2012 IEEE International Reliability Physics Symposium (IRPS).
C. Merckling,
G. Pourtois,
C. Adelmann,
2009,
2009 10th International Conference on Ultimate Integration of Silicon.
Geert Hellings,
Jerome Mitard,
Marc Heyns,
2008
.
Matty Caymax,
A. Dimoulas,
Michel Houssa,
2005
.
Marc Heyns,
Marc Meuris,
Florence Bellenger,
2007
.
Laura Nyns,
Herbert Struyf,
Guy Brammertz,
2011
.
H. Bender,
F. Iacopi,
R. Loo,
2009
.
Marc Meuris,
Guy Brammertz,
Matty Caymax,
2009
.
C. Merckling,
J. Kwo,
M. Caymax,
2010
.
M. Caymax,
M. Heyns,
T. Hoffmann,
2011
.
Geert Hellings,
Jerome Mitard,
Eddy Simoen,
2012
.
Robert Langer,
Matty Caymax,
Bernardette Kunert,
2016
.
Niamh Waldron,
Aaron Thean,
Wilfried Vandervorst,
2014
.
B. Douhard,
N. Waldron,
A. Franquet,
2011
.
A. Hikavyy,
C. Merckling,
R. Loo,
2016
.
Marc Heyns,
K. De Meyer,
Marc Meuris,
2008
.
A. Alian,
G. Brammertz,
M. Meuris,
2011,
IEEE Transactions on Electron Devices.
Andre Stesmans,
Marc Meuris,
Geoffrey Pourtois,
2009
.
Marc Heyns,
Marc Meuris,
Guy Brammertz,
2009
.
C. Adelmann,
M. Caymax,
A. Delabie,
2011
.
M. Caymax,
M. Heyns,
S. Sioncke,
2007
.
H. Bender,
M. Caymax,
M. Heyns,
2009,
2009 IEEE International Electron Devices Meeting (IEDM).
C. Merckling,
J. Kwo,
M. Caymax,
2010,
68th Device Research Conference.
G. Pourtois,
M. Caymax,
M. Heyns,
2009
.
Christoph Adelmann,
Marc Heyns,
Marc Meuris,
2008
.
T. Schram,
H. Bender,
I. Radu,
2018,
Chemistry of Materials.
M. Caymax,
J. Poortmans,
J. Poortmans,
1994
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1994
.
Stefan Kubicek,
T. Chiarella,
Matty Caymax,
2004
.
Guy Brammertz,
Matty Caymax,
Shotaro Takeuchi,
2010
.
S. De Gendt,
M. Heyns,
M. Caymax,
2003,
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407).
M. Caymax,
N. D. Nguyen,
S. Takeuchi,
2011
.
B. Holländer,
R. Loo,
M. Caymax,
2007
.
R. Loo,
M. Caymax,
P. Verheyen,
1999
.
Geert Hellings,
Jerome Mitard,
Anne Vandooren,
2010,
Advanced Lithography.
M. Caymax,
Y. Imai,
S. Kimura,
2018,
Semiconductor Science and Technology.
O. Richard,
R. Loo,
M. Caymax,
2012
.
M. Caymax,
K. Torii,
M. Hiratani,
2002,
2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303).
Martin L. Green,
O. Richard,
H. Bender,
2005
.
R. Loo,
M. Caymax,
N. D. Nguyen,
2008
.
M. Caymax,
M. Heyns,
T. Conard,
2006
.
M. Caymax,
Y. Mols,
E. Vancoille,
2014,
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).
O. Richard,
H. Bender,
R. Loo,
2006
.
M. Caymax,
M. Heyns,
E. Simoen,
2015
.
Marc Heyns,
Matty Caymax,
S. De Gendt,
2006
.
G. Pourtois,
M. Caymax,
M. Heyns,
2008
.
M. Caymax,
M. Heyns,
T. Conard,
2004
.
Christoph Adelmann,
Matty Caymax,
Ventsislav K. Valev,
2013
.
V V Moshchalkov,
T. Verbiest,
M. Caymax,
2011,
IEEE Electron Device Letters.
R. Loo,
M. Caymax,
W. Vandervorst,
2009
.
R. Loo,
M. Caymax,
W. Vandervorst,
2010
.
T. Verbiest,
M. Caymax,
F. Leys,
2009
.
I. Radu,
M. Caymax,
C. Huyghebaert,
2021,
ACS nano.
M. Caymax,
G. Beaucarne,
J. Poortmans,
2001
.
C. Adelmann,
M. Caymax,
A. Delabie,
2012
.
R. Loo,
M. Caymax,
W. Vandervorst,
2012
.
N. Collaert,
R. Loo,
M. Caymax,
2018,
Nanoscale.
H. Bender,
M. Caymax,
M. Heyns,
1994
.
M. Caymax,
A. Verhulst,
W. Vandervorst,
2000
.
Gang Wang,
Wilfried Vandervorst,
Marc Heyns,
2010
.
G. Wang,
J. Geypen,
H. Bender,
2008
.
O. Richard,
N. Collaert,
R. Loo,
2003
.
M. Caymax,
A. Slaoui,
J. Poortmans,
1999
.
R. Loo,
M. Caymax,
M. Kittler,
1999
.
N. Collaert,
S. Decoutere,
R. Loo,
2003
.
O. Richard,
R. Lindsay,
R. Loo,
2004
.
I. Radu,
M. Caymax,
T. Conard,
2018
.
I. Radu,
M. Caymax,
D. Lin,
2019,
2019 IEEE International Electron Devices Meeting (IEDM).
M. Caymax,
E. Simoen,
C. Claeys,
1999
.
M. Caymax,
A. Dimoulas,
P. Komninou,
2014,
ACS nano.
H. Bender,
M. Goryll,
R. Loo,
2001
.
M. Caymax,
A. Verhulst,
W. Vandervorst,
1998
.
O. Richard,
C. Adelmann,
A. Franquet,
2007
.
G. Wang,
O. Richard,
H. Bender,
2011,
ECS Transactions.
M. Caymax,
G. Borghs,
G. Brammertz,
2006,
cond-mat/0703662.
R. Waser,
M. Caymax,
P. Ehrhart,
2006
.
M. Caymax,
G. Borghs,
G. Brammertz,
2006,
cond-mat/0703661.
R. Loo,
M. Caymax,
M. Luysberg,
2006
.
M. Caymax,
J. Dekoster,
A. Vantomme,
2005
.
O. Richard,
M. Caymax,
M. Heyns,
2005
.
A. Stesmans,
M. Caymax,
J. Maes,
2005
.
A. Stesmans,
M. Caymax,
J. Maes,
2005
.
M. Caymax,
P. Houtte,
S. Sedky,
2000
.
C. Merckling,
S. Spiga,
M. Fanciulli,
2011
.
C. Merckling,
S. Spiga,
C. Wiemer,
2011
.
M. Caymax,
Y. Imai,
S. Kimura,
2017,
ACS applied materials & interfaces.
M. Caymax,
L. Nyns,
M. Eizenberg,
2011
.
K. Opsomer,
B. Kaczer,
A. Satta,
2007
.
R. Loo,
M. Caymax,
M. Meuris,
2008
.
M. Caymax,
M. Heyns,
E. Simoen,
2009
.
G. Pourtois,
R. Loo,
M. Caymax,
2009,
ECS Transactions.
M. Caymax,
M. Heyns,
T. Conard,
2007
.
M. Caymax,
M. Meuris,
F. Clemente,
2006
.
R. Loo,
M. Caymax,
A. O'Neill,
2007
.
W. D. Boer,
R. Loo,
M. Caymax,
2000
.
P. R. Berger,
R. Loo,
M. Caymax,
2009,
2009 International Semiconductor Device Research Symposium.
M. Caymax,
M. Heyns,
M. Meuris,
2007
.
D. Thomson,
M. Caymax,
W. Vandervorst,
1996
.
R. Loo,
M. Caymax,
M. Meuris,
2008
.
M. Caymax,
J. Poortmans,
J. Nijs,
1997,
Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997.
M. Caymax,
J. Kikkawa,
Gang Wang,
2011
.
M. Caymax,
J. Kuběna,
V. Holý,
1994
.
M. Caymax,
A. V. Ammel,
J. Kuběna,
1993
.
J. Swerts,
M. Caymax,
A. Delabie,
2010
.
B. Douhard,
K. Saraswat,
A. Franquet,
2012,
2012 Symposium on VLSI Technology (VLSIT).
R. Loo,
M. Caymax,
N. D. Nguyen,
2010
.
C. Merckling,
S. Spiga,
C. Wiemer,
2011
.
Gang Wang,
Eddy Simoen,
Marc Heyns,
2009
.
C. Adelmann,
A. Franquet,
M. Caymax,
2008
.
G. Pourtois,
A. Stesmans,
M. Caymax,
2008
.
R. Loo,
M. Caymax,
M. Willander,
2002
.
M. Caymax,
T. Witters,
S. Gendt,
2007
.
A. Lauwers,
K. Maex,
M. Caymax,
1991
.
R. Loo,
M. Caymax,
R. Rooyackers,
2005
.
Wilfried Vandervorst,
K. De Meyer,
Romain Delhougne,
2004
.
H. Bender,
K. Maex,
M. Caymax,
1995
.
Matty Caymax,
Matthias Bauer,
Peter Verheyen,
2007
.
M. Caymax,
S. Frabboni,
D. Howard,
1998
.
S. De Gendt,
S. Van Elshocht,
H. Bender,
2015,
Chemical communications.
I. Radu,
M. Caymax,
M. Heyns,
2018
.
M. Caymax,
J. Peeters,
1982
.
E. Rosseel,
O. Richard,
H. Bender,
2010
.
R. Loo,
M. Caymax,
W. Vandervorst,
2019,
Ultramicroscopy.
H. Bender,
I. Radu,
M. Caymax,
2018
.
M. Caymax,
W. Vandervorst,
M. Hopstaken,
2004
.
M. Caymax,
S. Sioncke,
T. Conard,
2012
.
C. Detavernier,
F. Iacopi,
M. Caymax,
2007
.
Christoph Adelmann,
Jean-Pierre Locquet,
Matty Caymax,
2012,
Photonics Europe.
N. Collaert,
C. Merckling,
N. Waldron,
2014,
2014 IEEE International Reliability Physics Symposium.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1996
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1995
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1994
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1994
.
G. Pourtois,
M. Caymax,
S. Sioncke,
2011,
The Journal of chemical physics.
C. Merckling,
S. Spiga,
C. Wiemer,
2013
.
H. Bender,
M. Caymax,
R. Mertens,
1998
.
M. Caymax,
W. Vandervorst,
P. Osiceanu,
1994
.
R. Loo,
M. Caymax,
B. Tillack,
2018
.
R. Loo,
M. Caymax,
M. Heyns,
2014
.
Johan Nijs,
Robert Mertens,
Jozef Poortmans,
1994
.
S. Decoutere,
R. Loo,
M. Caymax,
2001
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1996
.
M. Caymax,
J. Poortmans,
K. Hayama,
1995
.
B. Holländer,
R. Loo,
M. Caymax,
2004
.
G. Wang,
E. Rosseel,
H. Bender,
2010
.
R. Loo,
M. Caymax,
W. Vandervorst,
2005
.
R. Loo,
M. Caymax,
W. Vandervorst,
2004
.
R. Loo,
M. Caymax,
2004
.
M. Caymax,
F. De Smedt,
M. Heyns,
2005
.
M. Caymax,
R. Mertens,
R. V. Overstraeten,
1993
.
Roger Loo,
Matty Caymax,
Stephanie Kremer,
2001,
Microelectronic and MEMS Technologies.
Johan Nijs,
Roger Loo,
Jef Poortmans,
2001
.
M. Caymax,
A. Gawlik,
R. Kudrawiec,
2019,
Journal of Applied Physics.
M. Caymax,
R. Mertens,
G. Beaucarne,
2000
.
M. Caymax,
R. Mertens,
G. Beaucarne,
1997
.
M. Caymax,
R. Mertens,
W. Vandervorst,
1987
.
H. Bender,
I. Radu,
M. Caymax,
2019,
The Journal of chemical physics.
C. Merckling,
M. Caymax,
M. Heyns,
2011
.
M. H. van der Veen,
O. Richard,
H. Bender,
2011
.
M. Caymax,
T. Conard,
W. Vandervorst,
2002
.
I. Radu,
M. Caymax,
C. Huyghebaert,
2017,
Nanotechnology.
M. Caymax,
A. Delabie,
S. De Gendt,
2021,
Nanoscale.
A. Thean,
I. Radu,
V. Afanas’ev,
2016
.
H. Bender,
M. Caymax,
M. Heyns,
2016
.
O. Richard,
C. Adelmann,
A. Franquet,
2006
.
A. Thean,
C. Merckling,
R. Loo,
2013
.
T. Alford,
B. Schmidt,
R. Loo,
2005
.
H. Bender,
I. Radu,
A. Franquet,
2018
.
H. Dekkers,
B. Douhard,
M. Caymax,
2015
.
A. Franquet,
J. L. Hemmen,
M. Caymax,
2009
.
M. Caymax,
M. Heyns,
A. Delabie,
2008
.
G. Pourtois,
J. Swerts,
L. Ragnarsson,
2007
.
E. Sleeckx,
L. Ragnarsson,
M. Caymax,
2006
.
M. Caymax,
T. Conard,
M. Houssa,
2005
.
O. Richard,
M. Caymax,
M. Heyns,
2005
.
Wilfried Vandervorst,
Stefan De Gendt,
Marc Heyns,
2004
.
O. Richard,
H. Bender,
M. Caymax,
2003,
2003 8th International Symposium Plasma- and Process-Induced Damage..
O. Richard,
H. Bender,
M. Caymax,
2002
.
C. Detavernier,
M. Caymax,
Shao-Ren Deng,
2012
.
Qi Xie,
Yu-Long Jiang,
Matty Caymax,
2010
.
C. Detavernier,
M. Caymax,
Qi Xie,
2011,
IEEE Electron Device Letters.
A. Franquet,
M. Caymax,
M. Heyns,
2011
.
O. Richard,
H. Bender,
M. Caymax,
2002
.
H. Bender,
N. Collaert,
R. Loo,
2017,
Nanotechnology.
R. Loo,
M. Caymax,
E. Augendre,
2009
.
H. Bender,
M. Caymax,
O. Vatel,
1993
.
R. Loo,
M. Caymax,
G. Eneman,
2010
.
C. Adelmann,
M. Caymax,
T. Conard,
2013
.
M. Caymax,
M. Meuris,
V. Terzieva,
2007
.
M. Caymax,
P. Houtte,
S. Sedky,
2002
.
G. Pourtois,
B. Kaczer,
M. Caymax,
2007
.
C. Merckling,
J. Kwo,
M. Caymax,
2011
.
M. Caymax,
A. Dimoulas,
D. Brunco,
2006,
2006 European Solid-State Device Research Conference.
Geoffrey Pourtois,
Matty Caymax,
Annelies Delabie,
2011
.
G. Pourtois,
M. Caymax,
S. Sioncke,
2010
.
G. Pourtois,
M. Caymax,
M. Heyns,
2007
.
G. Pourtois,
M. Caymax,
M. Heyns,
2008
.
K. Barla,
I. Radu,
M. Caymax,
2016
.
Wilfried Vandervorst,
Marc Heyns,
Matty Caymax,
2003
.
M. Caymax,
W. Vandervorst,
F. Chollet,
1995
.
Wilfried Vandervorst,
Yosuke Shimura,
Matty Caymax,
2011
.
T. Alford,
R. Loo,
M. Caymax,
2004
.
Impact of the Ge content on the radiation hardness of hetero-junction diodes in SiGe strained layers
M. Caymax,
E. Simoen,
C. Claeys,
1998
.
M. Caymax,
E. Simoen,
C. Claeys,
1998,
28th European Solid-State Device Research Conference.
O. Richard,
H. Bender,
G. Pourtois,
2017,
Journal of microscopy.
Iuliana Radu,
Wilfried Vandervorst,
Stefan De Gendt,
2017
.
Vapor Phase Doping with N-type Dopant into Silicon by Atmospheric Pressure Chemical Vapor Deposition
R. Loo,
M. Caymax,
T. Conard,
2008
.
Trudo Clarysse,
Wilfried Vandervorst,
Clayton C. Williams,
1998
.
R. Degraeve,
D. Lin,
N. Collaert,
2012,
2012 International Electron Devices Meeting.
Marc Heyns,
Matty Caymax,
Clement Merckling,
2011
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1996
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1995,
Proceedings of the Third European Conference on Radiation and its Effects on Components and Systems.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1995
.
M. Caymax,
J. Poortmans,
J. Vanhellemont,
1992
.
M. Caymax,
M. Heyns,
E. Simoen,
2017
.
R. Loo,
M. Caymax,
S. Mantl,
2004
.
M. Goryll,
R. Loo,
M. Caymax,
1998
.
R. Loo,
M. Caymax,
G. Eneman,
2006
.
R. Loo,
M. Caymax,
B. Vincent,
2011
.
Roger Loo,
Akira Sakai,
Yosuke Shimura,
2011
.
Yosuke Shimura,
Matty Caymax,
Shigeaki Zaima,
2011
.
O. Richard,
H. Bender,
R. Loo,
2015
.
Wilfried Vandervorst,
Marc Heyns,
Roger Loo,
2013
.
Wilfried Vandervorst,
Marc Heyns,
Roger Loo,
2011
.
M. Caymax,
M. Heyns,
A. Delabie,
2008
.
O. Richard,
H. Bender,
C. Adelmann,
2007
.
A. Stesmans,
Y. Jia,
M. Caymax,
2004
.
C. Detavernier,
M. Caymax,
S. V. D. Berghe,
2011
.
M. Caymax,
A. Dimoulas,
M. Heyns,
2007
.
O. Richard,
H. Bender,
A. Thean,
2015
.
Matty Caymax,
Benjamin Vincent,
Ventsislav K. Valev,
2012
.
C. Merckling,
M. Caymax,
P. Absil,
2013,
2013 IEEE Photonics Society Summer Topical Meeting Series.
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