C. K. Hanish

Sensor systems for real-time feedback control of reactive ion etching

B. A. Rashap, J. Grizzle, P. Khargonekar, 1996 .

Estimating and controlling atomic chlorine concentration via actinometry

J. W. Grizzle, J. Grizzle, C. K. Hanish, 1999 .

Minimized response time of optical emission and mass spectrometric signals for optimized endpoint detection

Stella W. Pang, J. W. Grizzle, H. H. Chen, 1996 .

Modeling and algorithm development for automated optical endpointing of an HBT emitter etch

J. Grizzle, L. I. Kamlet, C. K. Hanish, 1997 .