Christopher A. Harrison

Semiconductor manufacturing process control and monitoring: A fab-wide framework

S. Joe Qin, Jin Wang, Richard Good, 2006 .

Minimum variance performance map for constrained model predictive control

S. Qin, Christopher A. Harrison, 2009 .

Feedback-Invariant Approach to Time-Delay Estimation for Performance Monitoring

S. Joe Qin, Christopher A. Harrison, 2012 .

Discriminating between disturbance and process model mismatch in model predictive control

S. Joe Qin, Christopher A. Harrison, S. Qin, 2009 .

A multi-step supervisory control strategy for semiconductor device manufacturing

C.A. Harrison, R. Good, D. Kadosh, 2004, 2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601).