A. Selvakumar

A multifunctional silicon micromachining technology for high performance microsensors and microactuators.

A. Selvakumar, 1997 .

A high sensitivity z-axis torsional silicon accelerometer

K. Najafi, F. Ayazi, A. Selvakumar, 1996, International Electron Devices Meeting. Technical Digest.

Low power, wide range threshold acceleration sensing system

K. Najafi, N. Yazdi, A. Selvakumar, 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

A high-sensitivity z-axis capacitive silicon microaccelerometer with a torsional suspension

Khalil Najafi, A. Selvakumar, K. Najafi, 1998 .

Thermal base drive for micromechanical resonators employing deep-diffusion bases

Khalil Najafi, Harrie A.C. Tilmans, A. Selvakumar, 1993 .

Vertical comb array microactuators

K. Najafi, A. Selvakumar, W. Juan, 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.