O. Tabata
发表
Y. Omura,
Y. Nonomura,
O. Tabata,
1997,
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
O. Tabata,
H. Hirasawa,
S. Aoki,
2001,
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
O. Tabata,
R. Asahi,
H. Funabashi,
1991,
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
K. J. Gabriel,
H. Fujita,
O. Tabata,
1992,
[1992] Proceedings IEEE Micro Electro Mechanical Systems.
Guang Meng,
Toshiyuki Tsuchiya,
Osamu Tabata,
2011
.
O. Tabata,
S. Sugiyama,
K. Kawahata,
1989
.
G. Fedder,
O. Tabata,
C. Hierold,
2005
.
O. Tabata,
S. Sugiyama,
R. Asahi,
1992
.
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
O. Tabata,
T. Tsuchiya,
Y. Taga,
1998
.
Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity
O. Tabata,
Y. Takeuchi,
T. Tsuchiya,
2013
.
O. Tabata,
T. Tsuchiya,
2006
.
O. Tabata,
S. Sugiyama,
K. Shimaoka,
1991,
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
G. Fedder,
O. Tabata,
C. Hierold,
2022
.
O. Tabata,
F. van Keulen,
T. Tsuchiya,
2015,
Journal of Microelectromechanical Systems.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2011
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2014
.
N. Mizutani,
O. Tabata,
Tetsuo Kobayashi,
2016
.
O. Tabata,
M. Wong,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.
O. Tabata,
K. Nakamura,
M. Gamil,
2014
.
Jan G. Korvink,
Osamu Tabata,
Oliver Brand,
2012
.
O. Tabata,
O. Tabata,
T. Yamaji,
2002,
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
O. Tabata,
T. Tsuchiya,
Haijun Zhang,
2020,
Applied optics.
Lianqing Liu,
Mi Li,
Ning Xi,
2011,
Biochemical and biophysical research communications.
Ahmed M. R. Fath El Bab,
O. Tabata,
K. Nakamura,
2014
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Koji Sugano,
2007
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
Shinichi Hirai,
Sadao Kawamura,
Satoshi Konishi,
2001
.
O. Tabata,
N. Matsuzuka,
Y. Hirai,
2004,
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
O. Tabata,
O. Tabata,
1986,
IEEE Transactions on Electron Devices.
O. Tabata,
Y. Shinohara,
M. Kurokawa,
2005,
Lab on a chip.
O. Tabata,
Y. Baba,
H. Nakanishi,
2000
.
O. Tabata,
J. Korvink,
U. Wallrabe,
2008
.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2019,
Electronics and Communications in Japan.
Kazuo Sato,
O. Tabata,
T. Yoshioka,
2000
.
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2012
.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2014
.
O. Tabata,
S. Sedky,
T. Tsuchiya,
2014
.
O. Tabata,
Wenlei Zhang,
T. Tsuchiya,
2017,
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
O. Tabata,
S. Sugiyama,
R. Asahi,
1993
.
O. Tabata,
T. Tsuchiya,
K. Miyamoto,
2007
.
Takayuki Yamada,
Kazuhiro Izui,
Shinji Nishiwaki,
2010
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2009
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2010,
Journal of Microelectromechanical Systems.
O. Tabata,
R. Egashira,
H. Habaki,
2010
.
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2012
.
O. Tabata,
T. Tsuchiya,
H. Yamada,
2010
.
O. Tabata,
W. Li,
Xiaojun Tian,
2013
.
Osamu Tabata,
Jan G. Korvink,
Christofer Hierold,
2005
.
O. Tabata,
N. Matsuzuka,
Y. Hirai,
2008
.
O. Tabata,
Wenlei Zhang,
T. Tsuchiya,
2019,
Sensors and Actuators A: Physical.
O. Tabata,
Wenlei Zhang,
T. Tsuchiya,
2017
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2014,
2014 International Conference on Optical MEMS and Nanophotonics.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2018,
2018 IEEE Micro Electro Mechanical Systems (MEMS).
O. Tabata,
Kei Iida,
T. Tsuchiya,
2020,
bioRxiv.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2015
.
The effect of polymer matrix on laser microfabrication of Au nanoparticles dispersed polymer resists
O. Tabata,
H. Yagyu,
2008
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2010
.
O. Tabata,
S. Konishi,
S. Sugiyama,
1997,
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311).
O. Tabata,
T. Tsuchiya,
K. Kamei,
2017
.
O. Tabata,
Do-Nyun Kim,
Zhipeng Ma,
2016
.
O. Tabata,
Do-Nyun Kim,
Zhipeng Ma,
2015
.
O. Tabata,
Do-Nyun Kim,
H. Yagyu,
2016,
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS).
O. Tabata,
T. Tsuchiya,
T. Ikehara,
2010
.
N. Xi,
Lianqing Liu,
O. Tabata,
2011
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2019,
Japanese Journal of Applied Physics.
O. Tabata,
Y. Takeuchi,
T. Tsuchiya,
2012
.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2010
.
O. Tabata,
1998
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2016
.
O. Tabata,
S. Hayashi,
K. Sugano,
2005
.
O. Tabata,
S. Hayashi,
K. Sugano,
2004,
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
O. Tabata,
N. Matsuzuka,
Y. Hirai,
2005
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2012
.
O. Tabata,
S. Nishiwaki,
K. Izui,
2018,
Structural and Multidisciplinary Optimization.
O. Tabata,
S. Sedky,
T. Tsuchiya,
2015
.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2022,
Japanese Journal of Applied Physics.
O. Tabata,
Y. Hirai,
K. Sugano,
2012
.
O. Tabata,
Yong Chen,
Li Liu,
2011
.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2009
.
O. Tabata,
S. Nakajima,
M. Aoki,
1986
.
O. Tabata,
Yong Chen,
K. Kamei,
2013,
Advanced healthcare materials.
K. Sugano,
O. Tabata,
T. Tsuchiya,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
Osamu Tabata,
Toshiyuki Tsuchiya,
Zhipeng Ma,
2016
.
O. Tabata,
T. Tsuchiya,
M. Iwamoto,
2019,
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2008
.
O. Tabata,
Do-Nyun Kim,
Jae‐Young Lee,
2017,
The journal of physical chemistry. B.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Koji Sugano,
2013
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2012
.
O. Tabata,
T. Tsuchiya,
Weiyuan Sun,
2008
.
Mixing Speed- and Temperature-Controlled Microreactor for Gold Nanoparticle Synthesis (Japanese Titl
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2010
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2017
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2018,
Int. J. Autom. Technol..
O. Tabata,
O. Tabata,
I. Igarashi,
1987,
IEEE Transactions on Electron Devices.
Osamu Tabata,
Takao Ishida,
Toshiyuki Mihara,
1999
.
O. Tabata,
T. Mihara,
S. Tamura,
1996
.
O. Tabata,
S. Nakajima,
S. Mochizuki,
1985
.
O. Tabata,
T. Tsuchiya,
W. Yoshikawa,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2018,
Sensors and Materials.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2018,
Applied Sciences.
O. Tabata,
T. Tsuchiya,
A. Taniyama,
2016,
Journal of Microelectromechanical Systems.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2015
.
O. Tabata,
H. Yagyu,
2008
.
O. Tabata,
Y. Isono,
O. Tabata,
2003,
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
O. Tabata,
T. Ishida,
K. Song,
1995
.
Akira Ishida,
Toshiyuki Tsuchiya,
Osamu Tabata,
2008
.
Y. Isono,
O. Tabata,
J. Korvink,
2004
.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2022,
bioRxiv.
Yuechao Wang,
Lianqing Liu,
Mi Li,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
O. Tabata,
O. Tabata,
K. Yamamoto,
1999,
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
O. Tabata,
S. Sugiyama,
M. Takigawa,
1990
.
O. Tabata,
H. Kotera,
I. Kanno,
2011
.
Osamu Tabata,
O. Tabata,
Takeshi Yamamoto,
1998,
Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
Y. Omura,
Y. Nonomura,
O. Tabata,
1998
.
Osamu Tabata,
Hiroaki Nakanishi,
Yoshinobu Baba,
2000
.
Osamu Tabata,
Yoshinobu Baba,
Masanori Ueda,
2004,
Int. J. Inf. Acquis..
O. Tabata,
T. Tsuchiya,
A. Banerjee,
2017,
2017 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK).
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2017,
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS).
O. Tabata,
T. Tsuchiya,
T. Tanemura,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2015
.
O. Tabata,
N. Matsuzuka,
2008
.
O. Tabata,
N. Matsuzuka,
Y. Hirai,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
O. Tabata,
S. Hayashi,
O. Tabata,
2004,
Journal of Microelectromechanical Systems.
S. Kawamura,
Tetsuya Ogata,
Susumu Sugiyama,
2002,
Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).
Osamu Tabata,
Toshiyuki Taguchi,
Isemi Igarashi,
1990
.
O. Tabata,
K. Mawatari,
T. Kitamori,
2019,
Advanced Materials Technologies.
Yoshikazu Hirai,
Osamu Tabata,
O. Tabata,
2013,
IEEE Nanotechnology Magazine.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Koji Sugano,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
O. Tabata,
A. Ishida,
M. Sato,
2005
.
O. Tabata,
S. Hayashi,
H. Yagyu,
2006
.
O. Tabata,
Chanseok Lee,
Do-Nyun Kim,
2018,
Nucleic acids research.
Masahiro Fujita,
Ryo Sato,
Toshiyuki Tsuchiya,
2010,
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems.
Y. Isono,
O. Tabata,
T. Kakinaga,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
O. Tabata,
Zhipeng Ma,
T. Tsuchiya,
2017
.
Young-Joo Kim,
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
2015,
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
Lianqing Liu,
O. Tabata,
W. Li,
2014,
The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS).
Osamu Tabata,
J. Shin,
O. Tabata,
1999
.
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2008
.
S. Hafizovic,
O. Tabata,
Y. Hirai,
2006,
Journal of Microelectromechanical Systems.
Osamu Tabata,
O. Tabata,
Kouji Yamamoto,
2000
.
O. Tabata,
T. Tsuchiya,
K. Nakamura,
2016
.
Yoshikazu Hirai,
Toshiyuki Tsuchiya,
Osamu Tabata,
2016
.
O. Tabata,
H. Yagyu,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
O. Tabata,
T. Tsuchiya,
K. Kamei,
2020
.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2018,
2018 IEEE Micro Electro Mechanical Systems (MEMS).
Hiroshi Sugiyama,
Toshiyuki Tsuchiya,
Koji Sugano,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
O. Tabata,
M. Uemura,
S. Nishio,
2005,
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..
O. Tabata,
T. Tsuchiya,
K. Kawai,
2020,
Micro & Nano Letters.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2020
.
O. Tabata,
S. Hayashi,
H. Yagyu,
2003,
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
Shigehiko Hayashi,
Osamu Tabata,
Hiromasa Yagyu,
2003
.
Xiaojun Tian,
Osamu Tabata,
Longhai Li,
2013,
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
O. Tabata,
Do-Nyun Kim,
Zhipeng Ma,
2018,
Small.
Osamu Tabata,
O. Tabata,
2010,
IEEE Nanotechnology Magazine.
Koji Sugano,
Osamu Tabata,
O. Tabata,
2002
.
O. Tabata,
K. Sugano,
2001
.
O. Tabata,
K. Sugano,
2000,
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530).
O. Tabata,
K. Sugano,
1999,
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478).
O. Tabata,
Yong Chen,
K. Kamei,
2013,
Advanced healthcare materials.
Kazuhiro Izui,
Shinji Nishiwaki,
Yoshikazu Hirai,
2018
.
Ahmed M. R. Fath El-Bab,
O. Tabata,
K. Nakamura,
2014,
2014 International Conference on Engineering and Technology (ICET).
O. Tabata,
K. Nakamura,
M. Gamil,
2013
.
O. Tabata,
M. Serry,
K. Nakamura,
2012,
2012 First International Conference on Innovative Engineering Systems.
Susumu Sugiyama,
Osamu Tabata,
Hirofumi Funabashi,
1991
.
O. Tabata,
H. Shiraishi,
S. Ikeda,
2000
.
Shuichi Yamashita,
Toshiyuki Tsuchiya,
Osamu Tabata,
2012
.
O. Tabata,
T. Tsuchiya,
A. Banerjee,
2017
.
O. Tabata,
Y. Baba,
K. Nakajima,
2006,
Analytical Chemistry.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2015
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Koji Sugano,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2018,
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
Masayoshi Esashi,
Susumu Sugiyama,
Osamu Tabata,
1992
.
O. Tabata,
T. Tsuchiya,
K. Miyamoto,
2016
.