A. Hu

Modeling and control of an epitaxial silicon deposition process with step disturbances

Armann Ingolfsson, Emanuel M. Sachs, A. Hu, 1991, [1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Run-by-run process control: performance benchmarks

Armann Ingolfsson, Emanuel M. Sachs, A. Hu, 1992, [1992 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

Process control system for VLSI fabrication

Ruey-Shan Guo, Emanuel M. Sachs, Sungdo Ha, 1991 .

On-line process optimization and control using the sequential design of experiments

E. Sachs, R.-S. Guo, S. Ha, 1990, Digest of Technical Papers.1990 Symposium on VLSI Technology.

Run by run process control: combining SPC and feedback control

Armann Ingolfsson, Emanuel M. Sachs, A. Hu, 1995 .