P. Langer

Modeling and control of an epitaxial silicon deposition process with step disturbances

Armann Ingolfsson, Emanuel M. Sachs, A. Hu, 1991, [1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Run-by-run process control: performance benchmarks

Armann Ingolfsson, Emanuel M. Sachs, A. Hu, 1992, [1992 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

Impurity Redistribution during Silicon Epitaxial Growth and Semiconductor Device Processing

Joseph I. Goldstein, Paul H. Langer, P. Langer, 1974 .

Chemical Vapor Deposition of Selective Epitaxial Silicon Layers

P. Langer, C. Pai, R. Knoell, 1990 .