Robert Muhr

Classifying defects in topography images of silicon wafers

Corinna Kofler, Gunter Spöck, Robert Muhr, 2017, 2017 Winter Simulation Conference (WSC).

Detecting Star Cracks in Topography Images of Specular Back Surfaces of Structured Wafers

Corinna Kofler, Gunter Spöck, Robert Muhr, 2018, 2018 17th IEEE International Conference on Machine Learning and Applications (ICMLA).

Classifying Image Stacks of Specular Silicon Wafer Back Surface Regions: Performance Comparison of CNNs and SVMs

Corinna Kofler, Gunter Spöck, Robert Muhr, 2019, Sensors.