G. Stemme
发表
S. J. Bleiker,
A. Fischer,
U. Shah,
2015,
IEEE Transactions on Components, Packaging and Manufacturing Technology.
Contact printing for improved bond-strength of patterned adhesive full-wafer bonded 0-level packages
J. Oberhammer,
G. Stemme,
2004,
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
L. Tenerz,
G. Stemme,
E. Kalvesten,
1998,
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
Göran Stemme,
Thorbjörn Ebefors,
Johan Ulfstedt Mattsson,
1999
.
G. Stemme,
T. Ebefors,
E. Kaelvesten,
1998
.
G. Stemme,
T. Ebefors,
E. Kaelvesten,
1998
.
G. Stemme,
E. Kalvesten,
T. Ebefors,
1998,
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
G. Stemme,
E. Kalvesten,
T. Ebefors,
1999,
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
G. Stemme,
E. Kaelvesten,
P. Melvås,
2002
.
G. Stemme,
1991
.
S. J. Bleiker,
N. Roxhed,
G. Stemme,
2019,
Journal of Microelectromechanical Systems.
Wim Bogaerts,
Göran Stemme,
Moises Jezzini,
2021,
OPTO.
S. J. Bleiker,
G. Stemme,
F. Niklaus,
2017,
Journal of Microelectromechanical Systems.
G. Stemme,
E. Stemme,
1993
.
Membrane-sealed hollow microneedles and related administration schemes for transdermal drug delivery
N. Roxhed,
G. Stemme,
P. Griss,
2008,
Biomedical microdevices.
G. Stemme,
H. Andersson,
Wouter van der Wijngaart,
2000,
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).
N. Somjit,
J. Oberhammer,
G. Stemme,
2009,
2009 European Microwave Integrated Circuits Conference (EuMIC).
Peter Enoksson,
Göran Stemme,
Wouter van der Wijngaart,
2000
.
N. Roxhed,
G. Stemme,
F. Ribet,
2018,
Sensors and Actuators B: Chemical.
Göran Stemme,
Niclas Roxhed,
Wouter van der Wijngaart,
2004
.
G. Stemme,
P. Eriksson,
J. Andersson,
1997
.
G. Stemme,
P. Enoksson,
T. Corman,
1997
.
A. Fischer,
G. Stemme,
F. Niklaus,
2015,
Journal of Microelectromechanical Systems.
Wide temperature range through silicon vias made of Invar and spin-on glass for interposers and MEMS
A. Fischer,
G. Stemme,
F. Niklaus,
2016,
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
S. J. Bleiker,
A. Fischer,
T. Haraldsson,
2012
.
A. Fischer,
G. Stemme,
F. Niklaus,
2012
.
G. Stemme,
D. Reynaerts,
J. Peirs,
2010,
Journal of Microelectromechanical Systems.
G. Holzapfel,
N. Roxhed,
G. Stemme,
2007,
Journal of Microelectromechanical Systems.
G. Stemme,
P. Griss,
P. Enoksson,
2002
.
G. Stemme,
K. Pedersen,
M. Stenberg,
1988
.
G. Stemme,
1986,
IEEE Transactions on Electron Devices.
G. Stemme,
E. Stemme,
P. Enoksson,
1997
.
G. Stemme,
E. Stemme,
1990
.
J. Oberhammer,
G. Stemme,
F. Niklaus,
2004
.
G. Stemme,
F. Niklaus,
E. Kaelvesten,
2001
.
J. Oberhammer,
G. Stemme,
F. Niklaus,
2003
.
J. Oberhammer,
G. Stemme,
2005,
Journal of Microelectromechanical Systems.
R. Gutmann,
Jian-Qiang Lu,
G. Stemme,
2006
.
G. Stemme,
P. Enoksson,
T. Corman,
1998
.
J. Oberhammer,
G. Stemme,
F. Niklaus,
2010,
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).
G. Stemme,
L. Vivien,
C. Barrios,
2010,
Lab on a chip.
G. Stemme,
F. Niklaus,
A. Gehner,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
G. Stemme,
P. Enoksson,
T. Corman,
1998
.
Göran Stemme,
Frank Niklaus,
Adit Decharat,
2008
.
J. Oberhammer,
G. Stemme,
M. Sterner,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
J. Oberhammer,
G. Stemme,
R. Sauleau,
2010,
2010 Asia-Pacific Microwave Conference.
G. Stemme,
N. Sandstrom,
W. van der Wijngaart,
2009,
Journal of Microelectromechanical Systems.
J. Oberhammer,
G. Stemme,
U. Shah,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
J. Oberhammer,
G. Stemme,
M. Sterner,
2011,
Journal of Microelectromechanical Systems.
J. Oberhammer,
G. Stemme,
N. Somjit,
2009,
IEEE Transactions on Microwave Theory and Techniques.
Göran Stemme,
G. Stemme,
P. Griss,
2003
.
Göran Stemme,
Niclas Roxhed,
N. Roxhed,
2007
.
H Andersson,
W van der Wijngaart,
G. Stemme,
2001,
Electrophoresis.
Göran Stemme,
Helene Andersson,
Christina Jönsson,
2001,
Electrophoresis.
G. Stemme,
A. Fischer,
G. Stemme,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
G. Stemme,
D. Reynaerts,
J. Peirs,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
G. Stemme,
H. Gradin,
S. Braun,
2009
.
G. Stemme,
N. Sandstrom,
W. van der Wijngaart,
2009,
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
G. Stemme,
Wouter van der Wijngaart,
M. Kohl,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
G. Stemme,
F. Niklaus,
Alessandro Enrico,
2019,
ACS applied materials & interfaces.
G. Stemme,
F. Niklaus,
A. Tocchio,
2013
.
G. Stemme,
W. Wijngaart,
H. Gradin,
2013
.
A. Fischer,
G. Stemme,
F. Niklaus,
2012
.
S. J. Bleiker,
G. Stemme,
F. Niklaus,
2018,
Advanced materials.
Peter Enoksson,
Göran Stemme,
G. Stemme,
2001
.
G. Stemme,
S. Haasl,
2008
.
A robust micro conveyer realized by arrayed polyimide joint actuators1A robust micro conveyer realiz
Göran Stemme,
Thorbjörn Ebefors,
Edvard Kälvesten,
2000
.
Göran Stemme,
Niclas Roxhed,
Farizah Saharil,
2013
.
Göran Stemme,
Niclas Roxhed,
Wouter van der Wijngaart,
2004,
Lab on a chip.
Göran Stemme,
Olle Larsson,
G. Stemme,
1998
.
G. Stemme,
A. Olsson,
O. Larsson,
1997,
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
G. Stemme,
1995,
MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science.
G. Stemme,
P. Griss,
A. Russom,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
G. Stemme,
G. Stemme,
E. Kaelvesten,
1994
.
Lennart Löfdahl,
Göran Stemme,
Edvard Kälvesten,
1994
.
Peter Enoksson,
Göran Stemme,
G. Stemme,
1995
.
G. Stemme,
F. Ribet,
M. Swillo,
2019,
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
G. Stemme,
F. Ribet,
M. Swillo,
2019,
Applied Physics Letters.
G. Stemme,
S. Haasl,
T. Ebefors,
2005,
Journal of Microelectromechanical Systems.
G. Stemme,
E. Kalvesten,
C. Vieider,
1995,
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
Lennart Löfdahl,
Göran Stemme,
Edvard Kälvesten,
1996
.
Frank Niklaus,
Martin Lapisa,
Göran Stemme,
2011,
IEEE Journal of Selected Topics in Quantum Electronics.
N. Roxhed,
G. Stemme,
F. Niklaus,
2019,
Journal of Micromechanics and Microengineering.
N. Roxhed,
G. Stemme,
G. Lenk,
2015,
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Göran Stemme,
Niklas Svedin,
G. Stemme,
2003
.
Göran Stemme,
Niklas Sandström,
Tommy Haraldsson,
2010
.
A. Fischer,
N. Roxhed,
G. Stemme,
2012
.
Göran Stemme,
Patrik Melvås,
G. Stemme,
2003
.
G. Stemme,
E. Kalvesten,
G. Stemme,
2001,
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
G. Stemme,
E. Kaelvesten,
P. Melvås,
2001
.
G. Stemme,
P. Griss,
B. Samel,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
Göran Stemme,
Jessica Melin,
Johan Roeraade,
2002
.
G. Stemme,
P. Griss,
J. Roeraade,
2003,
Rapid communications in mass spectrometry : RCM.
N. Roxhed,
G. Stemme,
W. Wijngaart,
2015
.
N. Roxhed,
G. Stemme,
Wouter van der Wijngaart,
2013,
Nanotechnology.
J. Oberhammer,
G. Stemme,
J. Oberhammer,
2006,
Journal of Microelectromechanical Systems.
J. Oberhammer,
G. Stemme,
M. Tang,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
N. Roxhed,
G. Stemme,
H. Gatty,
2015
.
G. Stemme,
Wouter van der Wijngaart,
T. Frisk,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
G. Stemme,
E. Kaelvesten,
L. Löfdahl,
1995
.
N. Roxhed,
G. Stemme,
Wouter van der Wijngaart,
2020,
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
N. Roxhed,
G. Stemme,
A. Eklund,
2013,
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
N. Roxhed,
G. Stemme,
F. Niklaus,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
Peter Enoksson,
Göran Stemme,
Thierry Corman,
2000
.
A. Fischer,
G. Stemme,
F. Niklaus,
2017,
Journal of Microelectromechanical Systems.
W van der Wijngaart,
T. Haraldsson,
G. Stemme,
2010,
Journal of Microelectromechanical Systems.
T. Haraldsson,
G. Stemme,
W. Wijngaart,
2007
.
G. Stemme,
E. Kalvesten,
T. Corman,
1998,
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
G. Stemme,
E. Kaelvesten,
T. Corman,
1998
.
G. Lindbergh,
G. Stemme,
W. Wijngaart,
2005
.
N. Roxhed,
G. Stemme,
F. Niklaus,
2020,
Microsystems & nanoengineering.
S. J. Bleiker,
A. Fischer,
N. Somjit,
2012,
2012 IEEE 62nd Electronic Components and Technology Conference.
A. Fischer,
G. Stemme,
F. Niklaus,
2016
.
N. Roxhed,
G. Stemme,
M. Antelius,
2015
.
G. Stemme,
Wouter van der Wijngaart,
C. F. Carlborg,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
G. Stemme,
H. Andersson,
A. Hult,
2002,
Bioorganic & medicinal chemistry letters.
N. Roxhed,
G. Stemme,
P. Griss,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
Göran Stemme,
Aman Russom,
Volker Nock,
2007,
Biomedical microdevices.
G. Stemme,
H. Andersson,
W. Wijngaart,
2002
.
Peter Enoksson,
Göran Stemme,
Wouter van der Wijngaart,
2001
.
M. Despont,
S. J. Bleiker,
A. Fischer,
2012,
2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration.
G. Stemme,
H. Andersson,
A. Russom,
2005,
Analytical chemistry.
G. Stemme,
E. Stemme,
A. Olsson,
1996,
Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
S. J. Bleiker,
G. Stemme,
F. Niklaus,
2017
.
N. Roxhed,
G. Stemme,
F. Niklaus,
2015,
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
G. Stemme,
Wouter van der Wijngaart,
H. Gradin,
2009,
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
N. Roxhed,
G. Stemme,
F. Niklaus,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
G. Stemme,
F. Niklaus,
A. Decharat,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
N. Roxhed,
G. Stemme,
Wouter van der Wijngaart,
2021,
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
J. Oberhammer,
G. Stemme,
F. Niklaus,
2001
.
N. Roxhed,
G. Stemme,
S. Johansson,
2014,
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).
G. Stemme,
F. Niklaus,
L. Villanueva,
2022,
Microsystems & Nanoengineering.
S. J. Bleiker,
A. Fischer,
N. Roxhed,
2015,
Microsystems & Nanoengineering.
G. Stemme,
Wouter van der Wijngaart,
Anders Thorsén,
2004,
Journal of Microelectromechanical Systems.
M. Uhlén,
P. Nilsson,
G. Stemme,
2000
.
G. Stemme,
L. Löfdahl,
B. Johansson,
1991
.
G. Stemme,
L. Löfdahl,
B. Johansson,
1991
.
N. Roxhed,
G. Stemme,
Janosch Hauser,
2019,
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS).
N. Roxhed,
G. Stemme,
T. Last,
2021,
Journal of Microelectromechanical Systems.
N. Roxhed,
G. Stemme,
F. Ribet,
2020
.
G. Stemme,
H. Andersson,
H. Brismar,
2006
.
G. Stemme,
H. Brismar,
S. Rydholm,
2005
.
G. Stemme,
A. Griol,
C. Barrios,
2008
.
N. Roxhed,
G. Stemme,
A. Spyrou,
2022,
Advanced NanoBiomed Research.
G. Stemme,
H. Brismar,
S. Rydholm,
2006
.
G. Stemme,
H. Andersson,
H. Brismar,
2006
.
G. Stemme,
Wouter van der Wijngaart,
G. Amberg,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
N. Roxhed,
G. Stemme,
T. Winkler,
2022,
Biomedical Microdevices.
G. Stemme,
K. Gylfason,
F. Forsberg,
2016
.
H Germany,
G. Stemme,
Computer Science,
2020,
2005.06805.
G. Stemme,
F. Niklaus,
Alessandro Enrico,
2022,
Advanced materials.
G. Stemme,
F. Niklaus,
K. Gylfason,
2021,
Microsystems & nanoengineering.
Göran Stemme,
Niclas Roxhed,
Lina Nordquist,
2007,
Pharmaceutical Research.
N. Roxhed,
G. Stemme,
O. Beck,
2018,
Analytical chemistry.
Göran Stemme,
Niclas Roxhed,
Wouter van der Wijngaart,
2016,
PloS one.
Göran Stemme,
Niclas Roxhed,
Patrick Griss,
2008,
IEEE Transactions on Biomedical Engineering.
Göran Stemme,
Pekka Meriläinen,
Patrick Griss,
2002,
IEEE Transactions on Biomedical Engineering.
G. Stemme,
H. Andersson,
P. Griss,
2002
.
Göran Stemme,
Thomas Frisk,
Helene Andersson,
2005,
Electrophoresis.
Sjoerd Haasl,
Henrik Rödjegård,
Frank Niklaus,
2016
.
Peter Enoksson,
Göran Stemme,
Wouter van der Wijngaart,
2001
.
Göran Stemme,
Niclas Roxhed,
N. Roxhed,
2018,
Micromachines.
G. Stemme,
H. Andersson,
P. Griss,
2002,
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
Göran Stemme,
Helene Andersson,
G. Stemme,
2002,
Lab on a chip.
G. Stemme,
F. Niklaus,
V. Dubois,
2017,
Microsystems & Nanoengineering.
N. Roxhed,
G. Stemme,
F. Ribet,
2018,
Biomedical microdevices.
Göran Stemme,
Niclas Roxhed,
Federico Ribet,
2017,
Biosensors & bioelectronics.
Dominiek Reynaerts,
Jan Peirs,
Göran Stemme,
2011
.
Peter Enoksson,
Göran Stemme,
G. Stemme,
1996
.
Göran Stemme,
Frank Niklaus,
Andreas Gehner,
2013
.
A. Gehner,
G. Stemme,
F. Zimmer,
2012,
Journal of Microelectromechanical Systems.
G. Stemme,
F. Niklaus,
M. Bring,
2011,
Journal of Microelectromechanical Systems.
G. Stemme,
F. Zimmer,
M. Bring,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
Göran Stemme,
Björn Samel,
G. Stemme,
2007
.
A. Fischer,
G. Stemme,
F. Niklaus,
2017,
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
G. Stemme,
F. Niklaus,
L. Wågberg,
2020,
Journal of colloid and interface science.
N. Roxhed,
G. Stemme,
O. Beck,
2022,
Bioanalysis.
P. Verheyen,
G. Stemme,
F. Niklaus,
2022
.
Göran Stemme,
Frank Niklaus,
Carlos Errando-Herranz,
2015,
Optics letters.
Göran Stemme,
Thomas Frisk,
Hjalmar Brismar,
2007,
Electrophoresis.
N. Roxhed,
G. Stemme,
O. Beck,
2019,
Analytical chemistry.
Anders Olsson,
Göran Stemme,
E. Stemme,
1996
.
N. Roxhed,
G. Stemme,
F. Niklaus,
2021,
Nature Communications.
Peter Enoksson,
Göran Stemme,
Pekka Merilainen,
2001
.
G. Stemme,
F. Niklaus,
Sabina Caneva,
2018,
Nature Communications.
Peter Enoksson,
Göran Stemme,
Frank Niklaus,
2003
.
G. Stemme,
A. Fischer,
G. Stemme,
2013,
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
Roshan Weerasekera,
Dinesh Pamunuwa,
Göran Stemme,
2011
.
Håkan Pettersson,
Göran Stemme,
Christer Jansson,
2007,
SPIE Defense + Commercial Sensing.
Göran Stemme,
Kristinn B. Gylfason,
Marco Colangelo,
2018,
OPTO.
G. Stemme,
E. Stemme,
G. Stemme,
2001,
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
G. Stemme,
S. Haasl,
W. van der Wijngaart,
2006,
Journal of Microelectromechanical Systems.
N. Roxhed,
G. Stemme,
O. Beck,
2019,
Analytical chemistry.
Gabriel Lenk,
Göran Stemme,
Niclas Roxhed,
2015,
Bioanalysis.
J. Schwenk,
N. Roxhed,
G. Stemme,
2022,
Analytical chemistry.
Göran Stemme,
E. Stemme,
Edvard Kälvesten,
1998
.
G. Kylberg,
N. Roxhed,
G. Stemme,
2020,
Lab on a chip.
Göran Stemme,
Niclas Roxhed,
Anton Pohanka,
2013
.
G. Stemme,
F. Niklaus,
H. V. D. van der Zant,
2018,
Nature Communications.
G. Stemme,
F. Niklaus,
G. Duesberg,
2023,
ACS nano.
Göran Stemme,
Thomas Frisk,
Niklas Sandström,
2008,
Lab on a chip.
Fredrik Forsberg,
Frank Niklaus,
Björn Samel,
2013
.
G. Stemme,
F. Ribet,
Luca De Pietro,
2018,
2018 IEEE Micro Electro Mechanical Systems (MEMS).
Göran Stemme,
G. Stemme,
E. Stemme,
1995
.
G. Stemme,
Wouter van der Wijngaart,
T. Frisk,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
Lennart Löfdahl,
Göran Stemme,
Christian Vieider,
1996
.
J. Oberhammer,
G. Stemme,
J. Oberhammer,
2004,
Journal of Microelectromechanical Systems.
Göran Stemme,
Edvard Kälvesten,
Niklas Svedin,
2003
.
G. Stemme,
E. Kalvesten,
P. Enoksson,
2000,
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).
U. Shah,
G. Stemme,
F. Niklaus,
2020,
Optics express.
Anders Olsson,
Göran Stemme,
E. Stemme,
2000
.
Peter Enoksson,
Göran Stemme,
G. Stemme,
1996
.
Göran Stemme,
Wouter van der Wijngaart,
Hans Sohlström,
2010,
Optics express.
Göran Stemme,
Gjermund Kittilsland,
B. Nordén,
1990
.
G. Stemme,
W. van der Wijngaart,
D. Chugh,
2007,
Journal of Microelectromechanical Systems.
Lennart Löfdahl,
Göran Stemme,
Edvard Kälvesten,
1996,
Microelectromechanical Systems (MEMS).
A. Fischer,
G. Stemme,
F. Niklaus,
2012,
2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO).
N. Roxhed,
G. Stemme,
M. Antelius,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
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