R. Socha

发表

G. Vandenberghe, J. Finders, S. Verhaegen, 2010, Advanced Lithography.

Douglas J. Van Den Broeke, Kurt E. Wampler, Thomas L. Laidig, 2003, SPIE Advanced Lithography.

A. R. Neureuther, R. J. Socha, A. Neureuther, 1996 .

Lieve Van Look, Geert Vandenberghe, Jo Finders, 2008, Photomask Japan.

Will Conley, J. Fung Chen, Stephen D. Hsu, 2004, SPIE Advanced Lithography.

Stephen Hsu, Mircea Dusa, Robert John Socha, 2002, SPIE Advanced Lithography.

Robert Socha, Bogusław Kogut, R. Socha, 2020, Sustainability.

Will Conley, John S. Petersen, Robert J. Socha, 1999, Photomask and Next Generation Lithography Mask Technology.

Thomas V. Pistor, Andrew R. Neureuther, Robert John Socha, 2000, Advanced Lithography.

Robert John Socha, Andrew R. Neureuther, A. Neureuther, 1995, Advanced Lithography.

Sudhar Raghunathan, Jan Hermans, Robert Socha, 2018, Advanced Lithography.

Ronald L. Gordon, Bruce W. Smith, Martin McCallum, 1998, Photomask Technology.

Vincent Wiaux, Geert Vandenberghe, Jo Finders, 2006, SPIE Photomask Technology.

Stephen D. Hsu, Robert J. Socha, Douglas J. Van Den Broeke, 2004, Photomask Japan.

Robert John Socha, Reiner Garreis, Donis G. Flagello, 2004, SPIE Advanced Lithography.