M. Glodde

发表

Performance of tri-layer process required for 22 nm and beyond

Yayi Wei, Kwang Sub Yoon, Mark Kelling, 2011, Advanced Lithography.

Systematic studies on reactive ion etch-induced deformations of organic underlayers

Yayi Wei, Markus Brink, Sebastian Engelmann, 2011, Advanced Lithography.

Self-organization of supramolecular helical dendrimers into complex electronic materials

K. D. Singer, M. Glodde, S. D. Hudson, 2002, Nature.

Fluorine-free Photoacid Generators for 193 nm Lithography Based on Non-Sulfonate Organic Superacids

M. Glodde, Sen Liu, P. Varanasi, 2010 .

Physiochemical properties of low and high molecular weight poly(ethylene glycol)-grafted poly(ethylene imine) copolymers and their complexes with oligonucleotides.

M. Glodde, G. Lutz, S. Sirsi, 2006, Biomacromolecules.

Focus improvement with NIR absorbing underlayer attenuating substructure reflectivity

Wu-Song Huang, Martin Glodde, Seiichiro Tachibana, 2012, Other Conferences.

Exploring and expanding the structural diversity of self-assembling dendrons through combinations of AB, constitutional isomeric AB2, and AB3 biphenyl-4-methyl ether building blocks.

M. Glodde, V. Percec, Brad M. Rosen, 2006, Chemistry.

Advanced wafer bonding and laser debonding

B. Dang, P. Andry, C. Tsang, 2014, 2014 IEEE 64th Electronic Components and Technology Conference (ECTC).

Self-assembly of semifluorinated minidendrons attached to electron-acceptor groups into pyramidal columns.

M. R. Imam, M. Glodde, T. Bera, 2007, Chemistry.

Self-assembly of semifluorinated dendrons attached to electron-donor groups mediates their pi-stacking via a helical pyramidal column.

M. Glodde, T. Bera, V. Percec, 2006, Chemistry.

Designing libraries of first generation AB3 and AB2 self-assembling dendrons via the primary structure generated from combinations of (AB)(y)-AB3 and (AB)(y)-AB2 building blocks.

M. Glodde, V. Percec, G. Ungar, 2004, Journal of the American Chemical Society.

Synthesis, structural analysis, and visualization of poly(2‐ethynyl‐9‐substituted carbazole)s and poly(3‐ethynyl‐9‐substituted carbazole)s containing chiral and achiral minidendritic substituents

M. Glodde, T. Bera, V. Percec, 2002 .

Hierarchical self-assembly, coassembly, and self-organization of novel liquid crystalline lattices and superlattices from a twin-tapered dendritic benzamide and its four-cylinder-bundle supramolecular polymer.

M. Glodde, T. Bera, V. Percec, 2003, Chemistry.

Application of isomorphous replacement in the structure determination of a cubic liquid crystal phase and location of counterions.

M. Glodde, V. Percec, G. Ungar, 2003, Journal of the American Chemical Society.

erratum: Self-organization of supramolecular helical dendrimers into complex electronic materials

S. D. Hudson, M. Glodde, V. Percec, 2002, Nature.

Silicon photonic integrated circuit for on-chip spectroscopic gas sensing

Tymon Barwicz, Laurent Schares, Gerard Wysocki, 2019, OPTO.

Charge transport in hexagonal columnar liquid crystals self-organized from supramolecular cylinders based on acene-functionalized dendrons

M. Glodde, T. Bera, V. Percec, 2003 .

Transformation of a spherical supramolecular dendrimer into a pyramidal columnar supramolecular dendrimer mediated by the fluorophobic effect.

M. Glodde, V. Percec, P. Heiney, 2003, Angewandte Chemie.

Synthesis, structural analysis, and visualization of a library of dendronized polyphenylacetylenes.

J. N. Lowe, M. Glodde, V. Percec, 2006, Chemistry.

Measurements of acid generation by extreme ultraviolet irradiation in lithographic films

Gregory M. Wallraff, Dario L. Goldfarb, Gregory Denbeaux, 2007 .

Design, synthesis, and characterization of fluorine-free PAGs for 193-nm lithography

Pushkara Rao Varanasi, Sen Liu, Martin Glodde, 2010, Advanced Lithography.

Flip-Chip III-V-to-Silicon Photonics Interfaces for Optical Sensor

Tymon Barwicz, Swetha Kamlapurkar, Yves Martin, 2019, 2019 IEEE 69th Electronic Components and Technology Conference (ECTC).

Electronic transport in self-organizing columnar phases

Irina Shiyanovskaya, Kenneth D. Singer, Yoshiko Miura, 2003, SPIE OPTO.

Acid generation efficiency: EUV photons versus photoelectrons

Dario L. Goldfarb, Martin Glodde, Ali Afzali-Ardakani, 2016, SPIE Advanced Lithography.

Spin-on organic hardmask for topo-patterned substrate

Yoshikazu Yamaguchi, Greg Breyta, Tsutomu Shimokawa, 2014, Advanced Lithography.