J. Shimizu

发表

Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process

Yoshiaki Tashiro, Jun Shimizu, Libo Zhou, 2011 .

Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer

Y. Mikami, Libo Zhou, J. Shimizu, 2010 .

Development of metal cutting process accompanied by a localized compressive hydrostatic stress field formation: Examination by molecular dynamics simulation

Libo Zhou, J. Shimizu, Keito Uezaki, 2014 .

Defect-free fabrication for single crystal silicon substrate by chemo-mechanical grinding

Libo Zhou, J. Shimizu, Sumio Kamiya, 2006 .

Development of Single Step Grinding System for Large Scale ϕ300 Si Wafer: A Total Integrated Fixed-Abrasive Solution

Jun Shimizu, Hiroshi Eda, Libo Zhou, 2001 .

Application of giant magnetostrictive materials to positioning actuators

Hiroshi Eda, Yoshio Yamamoto, Y. Yamamoto, 1999, 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Cat. No.99TH8399).

Material removal mechanism beyond plastic wave propagation rate

Jun Shimizu, Hiroshi Eda, Libo Zhou, 2003 .

Analytical Study on Ductile-Regime Scratching of Glasses Using Sharply Pointed Tip Diamond Indenter

J. Shimizu, H. Eda, L. Chouanine, 1997 .

Material removal mechanism in rotary in-feed grinding - Modeling and analysis -

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2020 .

Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer

Jun Shimizu, Hiroshi Eda, Libo Zhou, 2008 .

Analysis of Grinding Mechanism of Silicon Wafer by Using Molecular Dynamics

J. Shimizu, 2014 .

Development of Localized Compressive Hydrostatic Pressure-assisted Cutting Method: Cutting Experiment and Molecular Dynamics Simulation using Sliding Element

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2017 .

Friction characteristics of mechanically microtextured metal surface in dry sliding

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2020 .

Finite element analysis of deflection and residual stress on machined ultra-thin silicon wafers

Lei Zhou, Libo Zhou, J. Shimizu, 2011 .

Development of Microtextured Photocatalytic Surface by Vibration-Assisted Scratching

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2014 .

Influence of Surface Micro Texture on Photocatalitic Function of Titanium Dioxide Film

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2012 .

Enhancement of Photocatalytic Reaction of Titanium Dioxide Film by Surface Texturing

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2010 .

Fundamental Study on Influence of Surface Topography on Photocatalytic Reaction

Libo Zhou, J. Shimizu, H. Eda, 2008 .

Evaluation of Subsurface Damage in Silicon Wafer Based on Deflection Analysis: —Thin Wafer Deformation Mechanism Revealed by Use of FEM—@@@—有限要素法を用いた数値シミュレーションによる薄いウェハの変形メカニズム解明—

Libo Zhou, J. Shimizu, Seiki Takahashi, 2017 .

Fundamental Research on Generation of Nanostructure by Means of Local Anodic Oxidation

Libo Zhou, J. Shimizu, H. Eda, 2008 .

Theoretical analysis on effects of grain size variation

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2017 .

Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer

Libo Zhou, J. Shimizu, H. Eda, 2007 .

Study on Nanomachining Process of Si Wafer using an Atomic Force Microscope

Libo Zhou, J. Shimizu, H. Eda, 2007 .

Chemo-mechanical grinding by applying grain boundary cohesion fixed abrasive for monocrystal sapphire

Libo Zhou, J. Shimizu, Ke Wu, 2021, Precision Engineering.

Development of binder-free CMG abrasive pellet and finishing performance on mono-crystal sapphire

Libo Zhou, J. Shimizu, Y. Zhu, 2020 .

D21 Research on defect detection method by image processing using wavelet transform

Hirotaka Ojima, Jun Shimizu, Libo Zhou, 2012 .

Advanced Color Toner for Fine Image Quality

J. Shimizu, Akihiro Eida, Shinichiro Omatsu, 2007 .

A Novel Single Step Thinning Process for Extremely Thin Si Wafers

J. Shimizu, H. Sato, Li Bo Zhou, 2009 .

Effects of Sodium Carbonate and Ceria Concentration on Chemo-Mechanical Grinding of Single Crystal Si Wafer

J. Shimizu, Y. Tashiro, H. Takahashi, 2009 .

Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process

Jun Shimizu, Libo Zhou, Renke Kang, 2009 .

Study on Improvement of Material Removal Rate in Chemo-Mechanical Grinding (CMG) of Si Wafer

Yoshiaki Tashiro, Jun Shimizu, Libo Zhou, 2008 .

Effect of Compressive Hydrostatic Stress on Torsional Deformation of Metal: —Analysis Using Molecular Dynamics—@@@—分子動力学による解析—

Libo Zhou, J. Shimizu, Keito Uezaki, 2016 .

Molecular dynamics simulation of effect of grinding wheel stiffness on nanogrinding process

Libo Zhou, J. Shimizu, H. Eda, 2008 .

Molecular dynamics simulation of vibration-assisted cutting: influences of vibration, acceleration and velocity

Jun Shimizu, Hiroshi Eda, Libo Zhou, 2006 .

Molecular dynamics simulation of vibration-assisted cutting: influences of vibration parameters

Jun Shimizu, Libo Zhou, Hiroshi Eda, 2006, Int. J. Manuf. Technol. Manag..

Research on Enhancement of Photocatalytic Activities Dioxide Film Surface by Generating Microcutting ofTitanium Grooves

Libo Zhou, J. Shimizu, Hirotaka Ojima, 2014 .

Development of high water-content cutting fluids with a new concept: Fire prevention and environmental protection

Hiroshi Eda, Jun Shimizu, Takeyuki Yamamoto, 2000 .

Development and implementation of real-time anomaly detection on tool wear based on stacked LSTM encoder-decoder model

J. Shimizu, Hirotaka Ojima, Kazuki Kaneko, 2023, The International Journal of Advanced Manufacturing Technology.

Study on the finishing capability and abrasives-sapphire interaction in dry chemo-mechanical-grinding (CMG) process

J. Shimizu, J. Yuan, Ke Wu, 2018 .

Study on the potential of chemo-mechanical-grinding (CMG) process of sapphire wafer

J. Shimizu, Hirotaka Ojima, Ke Wu, 2017 .

Molecular Dynamics Analysis of Elementary Process of Coating by a High-Temperature, High-Speed Droplet

J. Shimizu, H. Eda, Yoshifumi Kobayashi, 2006 .

(Flattening Process and Atomic Behavior of a Droplet)

J. Shimizu, H. Eda, Yoshifumi Kobayashi, 2006 .

Research on chemo-mechanical grinding of large size quartz glass substrate

Jun Shimizu, Zhongjun Qiu, Libo Zhou, 2009 .

Study on the potential of chemo-mechanical-grinding (CMG) process of sapphire wafer

J. Shimizu, Hirotaka Ojima, Ke Wu, 2016, The International Journal of Advanced Manufacturing Technology.

Study on Thermal Influence of Grinding Process on LiTaO3

J. Shimizu, J. Yuan, W. Hang, 2013 .

Study on Micro/Nano-Indentation of Typical Soft-Brittle Materials

J. Shimizu, J. Yuan, W. Hang, 2012 .

Molecular Dynamics Simulation of Chemo-Mechanical Grinding (CMG) by Controlling Interatomic Potential Parameters to Imitate Chemical Reaction

J. Shimizu, Takeyuki Yamamoto, Li Bo Zhou, 2009 .

Research on Chemo-Mechanical-Grinding (CMG) of Si wafer: —3rd report: Behavior of sodium carbonate in CMG wheels and effect of CMG wheel mechanical properties—@@@—第3報：砥石に含まれる塩基の作用の解明と砥石物性値の最適化によるCMGの確立—

J. Shimizu, Y. Tashiro, Yu Mikami, 2015 .

Study on Path Control Scheme for Vision Guided Micro Manipulation System

Jun Shimizu, Hiroyuki Asano, Hiroshi Eda, 2007 .

3323 Image based defect detection Algorithm by use of wavelet transformation

Jun Shimizu, Hirotaka Ojima, Jun Shimizu, 2011 .

A study on the diamond grinding of ultra-thin silicon wafers

J. Shimizu, H. Sato, Y. Tian, 2012 .

Study on Structure Transformation of Si Wafer in Grinding Process

J. Shimizu, M. Yamaguchi, H. Eda, 2007 .

Study on Subsurface Damage Generated in Ground Si Wafer

J. Shimizu, H. Iwase, H. Eda, 2007 .

Development of Finishing System Using Acoustically Levitated Abrasive

Jun Shimizu, Libo Zhou, Hirotaka Ojima, 2013, International Journal of Automation Technology.

Molecular dynamics simulation of the contact process in AFM surface observations

J. Shimizu, H. Eda, Li-bo Zhou, 2002 .

Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope

J. Shimizu, Hirotaka Ojima, T. Onuki, 2022 .

Research on Digital Filters for Si Wafer Surface Profile Measurement - Design of Filters by Total Variation

Jun Shimizu, Libo Zhou, Kazutaka Nonomura, 2012 .

Study on grinding of LiTaO3 wafer using effective cooling and electrolyte solution

Ju Long Yuan, Jun Shimizu, Libo Zhou, 2016 .

Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting

Jun Shimizu, Hiroshi Eda, J. Shimizu, 2004 .

Nanogrinding of multi-layered thin film amorphous Si solar panels

Jun Shimizu, Libo Zhou, Han Huang, 2011 .

Spectroscopic Measurements of Silicon Wafer Thickness for Backgrinding Process

J. Shimizu, Hirotaka Ojima, T. Onuki, 2011 .

Development of Extractor-Classifier-Regulator integrated anomaly detection model for turning process

J. Shimizu, Hirotaka Ojima, Kazuki Kaneko, 2023, Journal of Manufacturing Processes.

Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-Scale Stick-Slip Phenomenon

J. Shimizu, Takeyuki Yamamoto, Li-bo Zhou, 2013 .

Molecular dynamics simulation of friction on the atomic scale

Jun Shimizu, Etsuji Ohmura, Hiroshi Eda, 1998 .

Molecular Dynamics Simulation of AFM/FFM Surface Observation: Influence of Probe Tip Shape

J. Shimizu, H. Eda, Li-bo Zhou, 2007 .

Molecular Dynamics Simulation on Dependence of Atomic-scale Stick-slip Phenomenon upon Probe Tip Shape

J. Shimizu, H. Eda, Li-bo Zhou, 2002 .

SIMULATION ANALYSIS OF CONTACT PROCESS IN AFM SURFACE OBSERVATION

J. Shimizu, 2001 .

Molecular Dynamics Simulation of Metal Cutting with Local Hydrostatic Pressure Field Formation

J. Shimizu, Hirotaka Ojima, Keito Uezaki, 2012 .

Molecular Dynamics Simulation of Rubbing Phenomena in Ultra-Precision Abrasive Machining

J. Shimizu, Han Huang, Takeyuki Yamamoto, 2010 .

Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer

J. Shimizu, H. Eda, Li-bo Zhou, 2007 .

Simulation and experimental analysis of super high-speed grinding of ductile material

Jun Shimizu, Hiroshi Eda, Libo Zhou, 2002 .

Computer Simulation of Degradation for Spacecraft Mirror Surface in Space Environment (1st Report)-Atomic Behavior in Degradation Process and Influence of Surface Profile on Degradation.

J. Shimizu, H. Eda, E. Ohmura, 2000 .

Mold Pattern Fabrication by Nanoscratching

Han Huang, Jun Shimizu, Han Huang, 2013, Int. J. Autom. Technol..

Axisymmetric Aspherical Form Generation for Large Diameter Optical Components

Jun Shimizu, Hiroshi Eda, Libo Zhou, 2004 .

Modeling of Process Mechanisms in Pulsed Laser Micro Machining on Lithium Niobate Substrates

Jun Shimizu, Libo Zhou, Hirotaka Ojima, 2014, Int. J. Autom. Technol..