Sumio Kamiya

Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process

Yoshiaki Tashiro, Jun Shimizu, Libo Zhou, 2011 .

Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer

Y. Mikami, Libo Zhou, J. Shimizu, 2010 .

Defect-free fabrication for single crystal silicon substrate by chemo-mechanical grinding

Libo Zhou, J. Shimizu, Sumio Kamiya, 2006 .

Phase Controllable Synthesis of Well-Crystallized Rhodium Sulfides by the Hydrothermal Method

Sumio Kamiya, Wuxing Zhang, K. Yanagisawa, 2009 .

Silicon Nitride Swirl Lower-Chamber for High Power Turbocharged Diesel Engines

Satoshi Kato, Sumio Kamiya, Seiho Kawakami, 1985 .

Monoclinic Li2TiO3 nano-particles via hydrothermal reaction: Processing and structure

Sumio Kamiya, T. Kozawa, T. Ueda, 2014 .