U. Schmid

U. Schmid, M. Schneider, M. Dorfmeister, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1-x N thin films

U. Schmid, M. Schneider, P. Mayrhofer, 2018 .

Piezoelectric response optimization of multi roof tile-shaped modes in MEMS resonators by variation of the support boundary conditions

U. Schmid, J. Sánchez-Rojas, G. Pfusterschmied, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Fabrication and characterisation of ScAlN -based piezoelectric MEMS cantilevers

U. Schmid, P. Mayrhofer, M. Kucera, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Circular test structure for the determination of piezoelectric constants of ScxAl1−xN thin films applying Laser Doppler Vibrometry and FEM simulations☆

U. Schmid, P. Mayrhofer, A. Bittner, 2015, Sensors and actuators. A, Physical.

Impact of the substrate dependent polarity distribution in c-axis oriented AlN thin films on the etching behaviour and the piezoelectric properties

U. Schmid, M. Schneider, M. Schneider, 2016 .

A Thermo-Resistive Flow Sensor for Injection Rate Measurements

U. Schmid, G. Krötz, 2002 .

On-board injection rate measurements at DI-systems with a micromachined mass flow sensor

D. Schmitt-Landsiedel, U. Schmid, R. Hoffmann, 2001 .

Impact of Patterning Technique on the Long Term Stability of Ag Thin Films

U. Schmid, A. Bittner, F. Prewein, 2014 .

Electromigration resistance and long term stability of textured silver thin films on LTCC

Ulrich Schmid, Achim Bittner, Helmut Seidel, 2011 .

Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2014 .

Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids

U. Schmid, J. Sader, M. Schneider, 2020, Journal of Micromechanics and Microengineering.

Novel resonant MEMS sensor for the detection of particles with dielectric properties in aged lubricating oils

U. Schmid, N. Dörr, M. Schneider, 2020 .

Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

U. Schmid, N. Dörr, M. Schneider, 2019, Journal of Micromechanics and Microengineering.

Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS Resonators

U. Schmid, M. Schneider, G. Pfusterschmied, 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS).

Responsivity and sensitivity of piezoelectric MEMS resonators at higher order modes in liquids

U. Schmid, M. Schneider, G. Pfusterschmied, 2019, Sensors and Actuators A: Physical.

Microstructure and piezoelectric response of YxAl1−xN thin films

U. Schmid, P. Mayrhofer, A. Bittner, 2015 .

Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators

H. Seidel, U. Schmid, J. Sánchez-Rojas, 2010 .

Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2014 .

Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency

U. Schmid, K. Machida, K. Masu, 2021 .

Q-factor enhancement of piezoelectric MEMS resonators in liquids with active feedback

U. Schmid, F. Hofbauer, M. Schneider, 2018 .

Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin films

U. Schmid, M. Schneider, M. Schneider, 2018, Materials Research Express.

Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures

U. Schmid, M. Schneider, M. Fischeneder, 2017 .

Design and Characterization of In-Plane Piezoelectric Microactuators

J. C. Bellido, U. Schmid, J. Sánchez-Rojas, 2017 .

Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2015 .

Electrical and Microstructural Characterization of TiO2 Thin Films for Flexoelectric Devices

U. Schmid, M. Schneider, F. J. Maier, 2021 .

Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS Cantilevers

U. Schmid, M. Schneider, A. Bittner, 2014 .

The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

U. Schmid, P. Mayrhofer, A. Bittner, 2014 .

Effect of Metallization on the Lifetime Prediction of Mechanically Stressed Low-Temperature Co-Fired Ceramics Multilayers

Ulrich Schmid, Andreas Roosen, U. Schmid, 2005 .

Tailored and deep porosification of LTCC substrates with phosphoric acid

U. Schmid, A. Limbeck, M. Stöger-Pollach, 2019, Journal of the European Ceramic Society.

On the porosification of LTCC substrates with sodium hydroxide

U. Schmid, M. Schneider, A. Hajian, 2019, Composites Part B: Engineering.

Determination of Fuel Quantities with a Micromachined Injection Rate Sensor

U. Schmid, 2003 .

Thermoelectric Energy Harvesting Using Phase Change Materials (PCMs) in High Temperature Environments in Aircraft

Ulrich Schmid, Alexandros Elefsiniotis, U. Schmid, 2014, Journal of Electronic Materials.

Optimized Batch Process for Organic MEMS Devices

U. Schmid, M. Schneider, J. Hafner, 2018, Proceedings.

Si/4H–SiC heterostructure formation using metal-induced crystallization

U. Schmid, W. Artner, G. Pfusterschmied, 2021 .

Silicon microcavity arrays with open access and a finesse of half a million

U. Schmid, M. Schneider, D. Hüser, 2019, Light: Science & Applications.

Phenomenological Modeling of Low-Bias Sulfur Hexafluoride Plasma Etching of Silicon

U. Schmid, A. Hössinger, J. Weinbub, 2022, Solid-State Electronics.

Feature-Scale Modeling of Low-Bias SF6 Plasma Etching of Si

U. Schmid, A. Hössinger, J. Weinbub, 2021, 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS).

Physical-chemical stability of fluorinated III-N surfaces: Towards the understanding of the (0001) AlxGa1-xN surface donor modification by fluorination

U. Schmid, R. Pietschnig, M. Reiner, 2017 .

Thin films from functionalized carbon nanotubes using the layer-by-layer technique

U. Schmid, L. Rafailović, Christian Weilach, 2014 .

Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films

U. Schmid, M. Schneider, A. Bittner, 2016 .

Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films

U. Schmid, M. Schneider, A. Bittner, 2015 .

Influence of the PCB Manufacturing Process on the Measurement Error of Planar Relative Permittivity Sensors Up To 100 GHz

R. Weigel, U. Schmid, F. Michler, 2019, IEEE Transactions on Microwave Theory and Techniques.

A finite 3D field simulation method for permittivity gradient implementation of a novel porosification process in LTCC

R. Weigel, U. Schmid, A. Koelpin, 2013, 2013 IEEE MTT-S International Microwave Symposium Digest (MTT).

Electromagnetic field analysis with advanced structural modeling of microstrips on porosified LTCC

R. Weigel, U. Schmid, A. Koelpin, 2013, 2013 European Microwave Conference.

Microstructural Design of Advanced Architectures in Titanium/Platinum Thin Films by Laser Interference Metallurgy

U. Schmid, A. Lasagni, F. Mücklich, 2008 .

Field effect transistor based on ions as charge carriers

U. Schmid, Z. Jakšić, J. Matovic, 2012 .

Fracture Analysis of a-SiC:H Membranes after Thermal Annealing☆

U. Schmid, M. Schneider, A. Klein, 2016 .

Impact of Thermal Treatment on the Residual Stress and Young's Modulus of thin a-SiC:H Membranes Applying Bulge Testing

U. Schmid, M. Schneider, D. Maurer, 2015 .

Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films

U. Schmid, M. Schneider, T. Grille, 2014 .

Numerical simulation of implanted top-gate 6H-SiC JFET characteristics

M. Lades, W. Wondrak, U. Schmid, 1999 .

Impact of doping level on the metal assisted chemical etching of p-type silicon

U. Schmid, A. Backes, 2014 .

Impact of Ar+ bombardment of 4H–SiC substrates on Schottky diode barrier heights

U. Schmid, M. Schneider, G. Pfusterschmied, 2020 .

A Ti/Pt Hot Film Anemometer for CR-Injection Systems

U. Schmid, G. Krötz, 2002 .

A Mass Flow Sensor for Fuel Injection Quantity Measurements in Dl-Systems

D. Schmitt-Landsiedel, U. Schmid, G. Krötz, 2001 .

Temperature dependant dielectric breakdown of sputter-deposited AlN thin films using a time-zero approach

U. Schmid, M. Schneider, A. Bittner, 2014 .

Modelling the distribution of BaTiO3 nanoparticles in a P(VDF70-TrFE30) polymer matrix for permittivity calculation

U. Schmid, M. Schneider, D. Platz, 2019, Polymer.

Porosification behaviour of LTCC substrates with potassium hydroxide

U. Schmid, M. Schneider, M. Stöger-Pollach, 2018 .

3D characterisation of piezoelectric bistable MEMS membranes during switching

U. Schmid, M. Schneider, M. Dorfmeister, 2019, Sensors and Actuators A: Physical.

A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated Switching

U. Schmid, M. Schneider, M. Dorfmeister, 2019, Proceedings.

Silver Metallization on Porosified LTCC Deposited by Pulse Plating Technique

U. Schmid, A. Bittner, Frank Steinhäußer, 2015 .

Editorial for the Special Issue on Piezoelectric MEMS

U. Schmid, M. Schneider, 2018, Micromachines.

Graphical based characterisation and modelling of material gradients in porosified LTCC

Robert Weigel, Ulrich Schmid, Alexander Koelpin, 2014 .

Concentration and temperature dependent selectivity of the LTCC porosification process with phosphoric acid

R. Weigel, U. Schmid, A. Koelpin, 2017 .

Permittivity reduction and surface modification by porosification of LTCC

R. Weigel, U. Schmid, A. Koelpin, 2016 .

Nitrogen incorporation in sputter deposited molybdenum nitride thin films

U. Schmid, M. Schneider, J. Konrath, 2016 .

Comparative study of grain sizes and orientation in microstructured Au, Pt and W thin films designed by laser interference metallurgy

U. Schmid, A. Lasagni, F. Mücklich, 2009 .

Macroscopic 2D Design of Micro/Nano Grain Architectures by Laser Interference Metallurgy

U. Schmid, A. Lasagni, C. Gachot, 2007 .

Impact of auxiliary capacitively coupled plasma on the properties of ICP-CVD deposited a-SiNx:H thin films

U. Schmid, A. Bittner, J. Schalko, 2015 .

Viscous fluid–structure interaction of micro-resonators in the beam–plate transition

U. Schmid, D. Platz, A. Gesing, 2022, Journal of Applied Physics.

Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon

U. Schmid, A. Bittner, M. Leitgeb, 2016 .

Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates

U. Schmid, A. Ababneh, A. Bittner, 2010 .

Etching characteristics and mechanical properties of a-SiC:H thin films

M. Eickhoff, D. Schmitt-Landsiedel, U. Schmid, 2001 .

Communication—The Role of the Metal-Semiconductor Junction in Pt-Assisted Photochemical Etching of Silicon Carbide

U. Schmid, M. Schneider, M. Leitgeb, 2016 .

Temperature behavior of specific contact resistance and resistivity on nitrogen implanted 6H-SiC with titanium silicide ohmic contacts

W. Wondrak, U. Schmid, S. Sheppard, 1999 .

Investigation on the Porosification Behaviour of Fired LTCC Substrates

U. Schmid, A. Bittner, A. Roosen, 2009 .

Tantalum based multilayers for high temperature sensor applications

U. Schmid, M. Soldera, M. Grosser, 2008, 2008 IEEE Sensors.

A Cellular Automaton Based Interpretation of Metal Assisted Photochemical Porosiﬁcation of 4H Silicon Carbide

U. Schmid, M. Schneider, M. Leitgeb, 2018 .

Editors' Choice—A Cellular Automaton Based Interpretation of Metal Assisted Photochemical Porosification of 4H Silicon Carbide

U. Schmid, M. Schneider, M. Leitgeb, 2018 .

Porous single crystalline 4H silicon carbide rugate mirrors

U. Schmid, M. Schneider, M. Leitgeb, 2017 .

Nonenzymatic Electrochemical Determination of Paraoxon Ethyl in Water and Fruits by Graphene-Based NiFe Bimetallic Phosphosulfide Nanocomposite as a Superior Sensing Layer

U. Schmid, H. Bagheri, A. Hajian, 2019, Food Analytical Methods.

Efficient and Accurate Modeling of the Surface Deflection of Thin Layers on Composite Substrates with Applications to Piezoelectric Parameter Measurements

T. Sauter, U. Schmid, T. You, 2022, Micro.

Buckling Porous SiC Membranes

U. Schmid, M. Schneider, M. Dorfmeister, 2018, Proceedings.

On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC

U. Schmid, G. Pfusterschmied, S. Schwarz, 2020 .

Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study

U. Schmid, N. Kherani, A. B. Alamin Dow, 2014, Microsystem Technologies.

Influence of the AlN/Pt-ratio on the electro-mechanical properties of multilayered AlN/Pt thin film strain gauges at high temperatures

U. Schmid, C. Zarfl, M. Schneider, 2020 .

Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures

U. Schmid, C. Zarfl, M. Schneider, 2019, Sensors and Actuators A: Physical.

Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids

U. Schmid, J. Sánchez-Rojas, G. Pfusterschmied, 2017, Microsystem Technologies.

Analysis and modeling of a bimorph AlN piezoelectric autonomous microgenerator stimulated by β-emitting radioisotopes

U. Schmid, N. Kherani, A. B. Alamin Dow, 2011, 2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials.

Study of hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications

U. Schmid, S. Heun, S. Veronesi, 2023, Applied Surface Science.

15 GHz SAW nano-transducers using ultrananocrystalline diamond/AlN thin films

U. Schmid, N. Kherani, C. Popov, 2012, 2012 IEEE International Ultrasonics Symposium.

Nanocrystalline diamond/AlN structures for high efficient SAW nano-resonators

U. Schmid, N. Kherani, C. Popov, 2012, Proceedings of ISAF-ECAPD-PFM 2012.

Accuracy and precision of resonant piezoelectric MEMS viscosity sensors in highly viscous bituminous materials

U. Schmid, M. Schneider, B. Hofko, 2022, Sensors and Actuators A: Physical.

Enhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for SAW applications

U. Schmid, M. Schneider, W. Artner, 2018 .

Super-high-frequency SAW transducer utilizing AIN/ultrananocrystalline diamond architectures

U. Schmid, N. Kherani, C. Popov, 2013, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

On controlling EBL parameters for nanoelectromechanical resonators fabricated on insulating/semiconducting structures

U. Schmid, N. Kherani, C. Popov, 2013, 2013 IEEE 5th International Nanoelectronics Conference (INEC).

High frequency SAW nanotransducer utilizing ultrananocrystalline diamond/ A1N bimorph architecture

U. Schmid, N. Kherani, C. Popov, 2013, 2013 IEEE 5th International Nanoelectronics Conference (INEC).

Ultrananocrystalline Diamond-Based High-Velocity SAW Device Fabricated by Electron Beam Lithography

U. Schmid, N. Kherani, C. Popov, 2012, IEEE Transactions on Nanotechnology.

Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire

U. Schmid, M. Schneider, T. Knobloch, 2017 .

The influence of plasma power on the temperature-dependant conductivity and on the wet chemical etch rate of sputter-deposited alumina thin films

U. Schmid, A. Friedberger, S. Fricke, 2009 .

Arrays of open, independently tunable microcavities.

Ulrich Schmid, Michael Trupke, Achim Bittner, 2013, Optics express.

Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H interface layer

U. Schmid, W. Artner, G. Pfusterschmied, 2021 .

A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraft

Ulrich Schmid, Th. Becker, Alexandros Elefsiniotis, 2014 .

Comparison of On-Chip Mis Capacitors Based on Stacked Hfo2/Al2o3 Nanolaminates

J. Prásek, J. Hubálek, U. Schmid, 2022, SSRN Electronic Journal.

Investigation of the interaction between electrical discharges and low resistivity silicon substrates

U. Schmid, F. Mücklich, H. Seidel, 2008 .

Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications

U. Schmid, M. Schneider, M. Schneider, 2018, Materials Science in Semiconductor Processing.

Electro-mechanical properties and oxidation behaviour of TiAlNxOy thin films at high temperatures

U. Schmid, C. Zarfl, P. Schmid, 2015 .

TiAlN Thin Films as High Temperature Strain Gauges

U. Schmid, C. Zarfl, P. Schmid, 2014 .

Enhanced stability of Ti/Pt micro-heaters using a-SiC:H passivation layers

Ulrich Schmid, Helmut Seidel, H. Seidel, 2006 .

Microstructure and mechanical properties of sputter deposited tantalum nitride thin films after high temperature loading

H. Seidel, U. Schmid, M. Grosser, 2017 .

Layer-by-layer approach for deposition of pure carbon nanotubes and composite films for use as electrodes in electrochemical devices

U. Schmid, Timo Bohnenberger, 2014 .

Design and characterization of AlN-based in-plane microplate resonators

Ulrich Schmid, M. Kucera, Tomas Manzaneque, 2013 .

Wet chemical porosification of LTCC in phosphoric acid: Anorthite forming tapes

Ulrich Schmid, Achim Bittner, Frank Steinhäußer, 2015 .

Analysis and modeling of a piezoelectric energy harvester stimulated by β-emitting radioisotopes

Ulrich Schmid, Nazir P. Kherani, Ali B. Alamin Dow, 2011 .

The impact of substrate properties and thermal annealing on tantalum nitride thin films

U. Schmid, A. Roosen, H. Seidel, 2012 .

Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering

U. Schmid, A. Roosen, H. Seidel, 2010 .

Core Physics Tests of Thorium High-Temperature Reactor Pebble-Bed Core at Zero Power

V. Drüke, U. Schmid, U. Schmid, 1987 .

Determination of the hot- and cold-temperature coefficient of reactivity in the AVR core

T. Kindt, U. Schmid, P. Pohl, 1987 .

Ex Vivo Blood Viscosity Monitoring with Piezoelectric MEMS Resonators

U. Schmid, M. Schneider, Michael Schneider, 2022, 2022 IEEE Sensors.

Two-step procedure for multi-mode MEMS resonator-based sensing of fluid properties

Ulrich Schmid, Achim Bittner, Michael Schneider, 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

Roof tile-shaped modes in quasi free–free supported piezoelectric microplate resonators in high viscous fluids

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2016 .

MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing

Ulrich Schmid, Pasqualina M. Sarro, Jacopo Iannacci, 2018 .

Effect of substrate properties and thermal annealing on the resistivity of molybdenum thin films

Ulrich Schmid, Helmut Seidel, U. Schmid, 2005 .

Gauge Factor of Titanium/Platinum Thin Films up to 350°C

U. Schmid, C. Zarfl, P. Schmid, 2014 .

Impact of film thickness and temperature on the dielectric breakdown behavior of sputtered aluminum nitride thin films

Ulrich Schmid, Achim Bittner, Michael Schneider, 2015 .

Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films

U. Schmid, M. Schneider, A. Bittner, 2015 .

Integrated RGB laser light module for autostereoscopic outdoor displays

Ulrich Schmid, Garrie Vickers, Piotr Perlin, 2015, Photonics West - Lasers and Applications in Science and Engineering.

Nanoparticle detection in an open-access silicon microcavity

U. Schmid, G. Wachter, J. Schalko, 2017, 1712.01533.

Temperature Dependent Pore Formation in Metal Assisted Chemical Etching of Silicon

U. Schmid, A. Bittner, M. Leitgeb, 2016 .

Large-scale quantum technology based on luminescent centers in crystals

W. Munro, K. Nemoto, P. Walther, 2016, 2016 IEEE International Electron Devices Meeting (IEDM).

Flow-through sensor based on piezoelectric MEMS resonator for the in-line monitoring of wine fermentation

Ulrich Schmid, José Luis Sánchez-Rojas, V. Ruiz-Díez, 2018 .

The influence by trapezoidal conductor shapes on ring-resonator based material characterization up to 110 GHz

Robert Weigel, Ulrich Schmid, Alexander Koelpin, 2014, 2014 International Conference on Numerical Electromagnetic Modeling and Optimization for RF, Microwave, and Terahertz Applications (NEMO).

Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H–SiC

G. Pobegen, U. Schmid, W. Artner, 2021 .

Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes

G. Pobegen, U. Schmid, G. Pfusterschmied, 2021, Semiconductor Science and Technology.

Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes

G. Pobegen, U. Schmid, G. Pfusterschmied, 2020, Semiconductor Science and Technology.

Low-temperature epitaxial Si on 4H-SiC using metal-induced crystallization

U. Schmid, W. Artner, K. Hradil, 2020 .

Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures

U. Schmid, P. Mayrhofer, A. Bittner, 2019, Journal of Applied Physics.

Robust superelastic, metallic amplification unit for piezoelectric microactuators

Hans-Peter Seidel, Ulrich Schmid, Christian Bolzmacher, 2009, Microtechnologies.

Advanced determination of piezoelectric properties of AlN thin films on silicon substrates

J. Hernando, U. Schmid, A. Ababneh, 2008, 2008 IEEE Ultrasonics Symposium.

Simulation and laser vibrometry characterization of piezoelectric AlN thin films

Ulrich Schmid, José Luis Sánchez-Rojas, J. Hernando, 2008 .

Impact of AlN Seed Layer on Microstructure and Piezoelectric Properties of YxAl1−xN (x = 15%) Thin Films

U. Schmid, M. Schneider, S. Schwarz, 2022, Advanced Electronic Materials.

The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification

Ulrich Schmid, Jacopo Iannacci, E. Serra, 2016 .

Electrical and mechanical characterization of low temperature co-fired ceramics for high temperature sensor applications

Ulrich Schmid, M. Ziegler, C. Bienert, 2009, Microtechnologies.

A Novel High-temperature Aircraft-specific Energy Harvester Using PCMs and State of the art TEGs☆

Ulrich Schmid, Th. Becker, Alexandros Elefsiniotis, 2015 .

Wireless sensor node powered by aircraft specific thermoelectric energy harvesting

Ulrich Schmid, Martin Kluge, Th. Becker, 2011 .

Origin of the strong temperature effect on the piezoelectric response of the ferroelectric (co-)polymer P(VDF70-TrFE30)

U. Schmid, M. Schneider, J. Hafner, 2019, Polymer.

Multi-scale characterisation of a ferroelectric polymer reveals the emergence of a morphological phase transition driven by temperature

U. Schmid, S. Wood, F. Castro, 2021, Nature communications.

Design of piezoelectric microtransducers based on the topology optimization method

Ulrich Schmid, José Carlos Bellido, Alberto Donoso, 2016 .

Argon Bombardment of 4H Silicon Carbide Substrates for Tailored Schottky Diode Barrier Heights

U. Schmid, M. Schneider, J. Konrath, 2019, Materials Science Forum.

Controlling 4H–SiC Schottky Barriers by Molybdenum and Molybdenum Nitride as Contact Materials

U. Schmid, J. Konrath, F. Patocka, 2016, IEEE Transactions on Electron Devices.

Advanced Mid-Infrared Plasmonic Waveguides For On-Chip Integrated Photonics

B. Hinkov, U. Schmid, G. Strasser, 2023, 2305.03586.

Platinated ultrathin films made of carbon nanotubes

U. Schmid, J. Matovic, Frank Steinhäußer, 2012 .

Platinated ultrathin films made of carbon nanotubes

U. Schmid, J. Matovic, Frank Steinhäußer, 2011, Microsystem Technologies.

Stress engineering of polycrystalline aluminum nitride thin films for strain sensing with resonant piezoelectric microbridges

U. Schmid, M. Schneider, M. Schlögl, 2023, Sensors and Actuators A: Physical.

Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films

Ulrich Schmid, Achim Bittner, Michael Schneider, 2012 .

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

Ulrich Schmid, José Luis Sánchez-Rojas, Helmut Seidel, 2010 .

Impact of sputter deposition parameters on molybdenum nitride thin film properties

U. Schmid, S. Krivec, M. Schneider, 2015 .

Multi roof tile-shaped vibration modes in mems cantilever sensors for liquid monitoring purposes

Ulrich Schmid, Achim Bittner, Jose Luis Sanchez-Rojas, 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

Modal optimization and filtering in piezoelectric microplate resonators

Ulrich Schmid, José Carlos Bellido, Alberto Donoso, 2010 .

Morphological and Electrical Properties of Silver Thin Films Sputter Deposited on LTCC Substrates

U. Schmid, A. Bittner, H. Seidel, 2008 .

Magnetic and microstructural properties of sputter deposited Cr-doped aluminum nitride thin films on silicon substrates

U. Schmid, M. Schneider, E. Wistrela, 2017 .

Optimization method for designing multimodal piezoelectric MEMS energy harvesters

Ulrich Schmid, Jacopo Iannacci, E. Serra, 2015, Microtechnologies for the New Millennium.

Impact of adhesion promoters and sputter parameters on the electro-mechanical properties of Pt thin films at high temperatures

U. Schmid, C. Zarfl, M. Schneider, 2019, Sensors and Actuators A: Physical.

Impact of sintering temperature on phase composition, microstructure, and porosification behavior of LTCC substrates

U. Schmid, A. Kromka, M. Schneider, 2022, Journal of the European Ceramic Society.

High-Frequency Characterization of Porous Low-Temperature Cofired Ceramics Substrates

H. Seidel, U. Schmid, A. Bittner, 2010 .

The porosification of fired LTCC substrates by applying a wet chemical etching procedure

Ulrich Schmid, Achim Bittner, U. Schmid, 2009 .

Metal assisted photochemical etching of 4H silicon carbide

U. Schmid, M. Schneider, S. Schwab, 2017 .

A robust pressure sensor for harsh environmental applications

Ulrich Schmid, Helmut Seidel, Alois Friedberger, 2012 .

Biomimetic MEMS to assist, enhance, and expand human sensory perceptions: a survey on state-of-the-art developments

Ulrich Schmid, Ille C. Gebeshuber, Teresa Makarczuk, 2011, Microtechnologies.

Silicon microcavity arrays with open access and a finesse of half a million

U. Schmid, D. Hüser, G. Wachter, 2019, Light, science & applications.

Solution-processed ferroelectric polymer nanocrystals

U. Schmid, S. Benaglia, J. Hafner, 2023, Polymer.

Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO2/TiO2/IrO2 capacitors

Martin A. Schneider, U. Schmid, A. Kromka, 2022, Journal of Applied Physics.

Stress analysis of circular membrane-type MEMS microphones with piezoelectric read-out

U. Schmid, M. Schneider, Christian Bretthauer, 2022, Sensors and Actuators A: Physical.

Piezoelectric MEMS resonators for density and viscosity sensing in engine oil with diesel fuel

E. Wistrela, J. Toledo, G. Pfusterschmied, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface

U. Schmid, M. Schneider, A. Bittner, 2015 .

A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms

U. Schmid, M. Schneider, A. Bittner, 2014 .

Intermodal coupling spectroscopy of mechanical modes in microcantilevers

U. Schmid, B. Schuster, I. Ignat, 2023, Beilstein journal of nanotechnology.

3D arrangement of epitaxial graphene conformally grown on porousified crystalline SiC

U. Schmid, S. Heun, S. Bals, 2021, Carbon.

Lifetime prediction for mechanically stressed low temperature co-fired ceramics

Ulrich Schmid, Andreas Roosen, U. Schmid, 2004 .

Density-viscosity sensor based on piezoelectric MEMS resonator and oscillator circuit

U. Schmid, T. Manzaneque, M. Kucera, 2014, IEEE SENSORS 2014 Proceedings.

A Combination of Metal Assisted Photochemical and Photoelectrochemical Etching for Tailored Porosification of 4H SiC Substrates

U. Schmid, M. Schneider, M. Leitgeb, 2016 .

Temperature-dependent electrowetting behavior on Teflon AF1600

U. Schmid, D. Platz, P. Fulmek, 2022, Journal of Materials Science.

Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study

Ulrich Schmid, Ali B. Alamin Dow, Nazir P. Kherani, 2014 .

Strain gauge factor and TCR of sputter deposited Pt thin films up to 850°C

H. Seidel, U. Schmid, A. Friedberger, 2008, Italian National Conference on Sensors.

Influence of the sputter gas composition on the electromechanical properties and on the stability of TiAlNxO1-x thin films

U. Schmid, C. Zarfl, S. Schwab, 2017 .

High temperature measurement set-up for the electro-mechanical characterization of robust thin film systems

Ulrich Schmid, Helmut Seidel, Alois Friedberger, 2013 .

Micromachined pressure sensor based on sapphire for high temperature applications

U. Schmid, A. Friedberger, H. Seidel, 2010 .

Nanostructural and piezoelectric characterization of electro-formed δ-phase poly(vinylidene fluoride) thin films

U. Schmid, M. Schneider, S. Benaglia, 2022, Materials Research Letters.

Rigorous analytical analysis of resonant Euler-Bernoulli beams with constant thickness and polynomial width

U. Schmid, B. Jakoby, M. Schneider, 2014, 2014 IEEE International Ultrasonics Symposium.

Selective wet chemical etching of metallic thin films designed by laser interference metallurgy (LIMET)

Ulrich Schmid, Rodolphe Catrin, Carsten Gachot, 2009, Microtechnologies.

Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading

U. Schmid, P. Mayrhofer, A. Bittner, 2016 .

High temperature performance of sputter-deposited piezoelectric aluminum nitride thin films

Ulrich Schmid, Achim Bittner, Michael Schneider, 2015, Microtechnologies for the New Millennium.

Impact of Sputter Deposition Parameters on the Leakage Current Behavior of Aluminum Nitride Thin Films

U. Schmid, M. Schneider, A. Bittner, 2012 .

Inductively-coupled plasma-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbide thin films for MEMS☆

Ulrich Schmid, Michael Schneider, Thomas Grille, 2016 .

FT-IR analysis of high temperature annealing effects in a-SiC:H thin films

Ulrich Schmid, Michael Schneider, Thomas Grille, 2017, Microtechnologies.

Spherulite-like microstructure observed for spin-cast P(VDF-TrFE) thin films and their ferroelectric characteristics

U. Schmid, M. Schneider, J. Hafner, 2023, Polymer.

Tunable Membrane for Electromagnetic Devices Using Dielectric Elastomers

H. Seidel, K. Bauer, U. Schmid, 2008 .

SiC devices for advanced power and high-temperature applications

Ulrich Schmid, Wolfgang Wondrak, Ekkehard Niemann, 2001, IEEE Trans. Ind. Electron..

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

U. Schmid, M. Schneider, J. Hafner, 2021, Materials Research Letters.

Flexoelectricity in polycrystalline TiO2 thin films

U. Schmid, A. Kromka, M. Schneider, 2020 .

Modelling out-of-plane and in-plane resonant modes of microplates in liquid media

Ulrich Schmid, M. Kucera, Tomas Manzaneque, 2015 .

Investigation on Different Damping Mechanisms on the Q Factor of MEMS Resonators

U. Schmid, M. Schneider, T. Neuzil, 2016 .

Flight Test Results of a Thermoelectric Energy Harvester for Aircraft

Ulrich Schmid, Martin Kluge, T. Fuss, 2012, Journal of Electronic Materials.

Wireless Sensing of Physical Parameters Inside Hermetically Enclosed Conductive Envelopes

Ulrich Schmid, Helmut Seidel, Martin Kluge, 2007 .

Mechanical and Electrical Characterization of Resonant Piezoelectric Microbridges for Strain Sensing

U. Schmid, M. Schneider, J. Hiesberger, 2022, Sensors and Actuators A: Physical.

Novel MEMS Sensor for Detecting Magnetic Particles in Liquids

Ulrich Schmid, Matthias Schlögl, Michael Schneider, 2018, Proceedings.

Resonantly excited AlN-based microcantilevers for immunosensing

M. J. Oliver, H. Seidel, U. Schmid, 2012 .

Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

J. L. Sánchez-Rojas, Tomás Manzaneque, J. Hernando, 2010 .

Stacked Layers of Different Porosity in 4H SiC Substrates Applying a Photoelectrochemical Approach

U. Schmid, M. Schneider, S. Schwab, 2017 .

High performance piezoelectric AlN MEMS resonators for precise sensing in liquids

Ulrich Schmid, Michael Schneider, G. Pfusterschmied, 2020, Elektrotech. Informationstechnik.

Impact of film thickness on the temperature-activated leakage current behavior of sputtered aluminum nitride thin films ☆

U. Schmid, M. Schneider, A. Bittner, 2015 .

Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMS

U. Schmid, G. Pfusterschmied, P. Moll, 2023, IEEE/LEOS International Conference on Optical MEMS.

Piezoelectric MEMS resonators for monitoring grape must fermentation

Ulrich Schmid, José Luis Sánchez-Rojas, V. Ruiz-Díez, 2016 .

Investigation of the Performance of Thermoelectric Energy Harvesters Under Real Flight Conditions

Ulrich Schmid, Dominik Samson, Alexandros Elefsiniotis, 2013, Journal of Electronic Materials.

Aircraft-Specific Thermoelectric Generator Module

Ulrich Schmid, T. Otterpohl, Martin Kluge, 2010 .

Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

U. Schmid, A. Flewitt, E. Iborra, 2017 .

Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range

U. Schmid, M. Schneider, G. Pfusterschmied, 2019, Journal of Vacuum Science & Technology B.

Evaluation of electron beam welding technique for the integration of robust sensor elements into high-pressure automotive systems

D. Schmitt-Landsiedel, U. Schmid, G. Krötz, 2008 .

Fast method for the calculation of surface bending on circular multilayered piezoelectric structures

U. Schmid, B. Jakoby, P. Mayrhofer, 2016, 2016 IEEE SENSORS.

Experimental verification of a novel MEMS multi-modal vibration energy harvester for ultra-low power remote sensing nodes

Ulrich Schmid, Jacopo Iannacci, E. Serra, 2015, Microtechnologies for the New Millennium.

Circular and linear enhancement-mode 6H-SiC MOSFETs for high temperature applications

W. Wondrak, U. Schmid, S. Sheppard, 1999 .

Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2011 .

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2012 .

Temperature Dependent Leakage Current Characteristics of an IrO 2/TiO 2/IrO 2 Redox Based Memristor and the Role of Aqueous Oxygen Evolution

Martin A. Schneider, U. Schmid, A. Kromka, 2020, SSRN Electronic Journal.

Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids

J. L. Sánchez-Rojas, V. Ruiz-Díez, J. Toledo, 2018 .

Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators

U. Schmid, V. Ruiz-Díez, J. Toledo, 2017, Microtechnologies.

A Novel Miniaturised Sensor for Combined Static and Dynamic Pressure Measurements in Harsh Environments

Ulrich Schmid, P. Schmid, C. Zarfl, 2016 .

Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire

U. Schmid, M. Schneider, M. Kaltenbacher, 2016 .

Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading

U. Schmid, P. Mayrhofer, A. Bittner, 2015, Microsystem Technologies.

High temperature stability of ScxAl1-xN (x=0.27) thin films

Ulrich Schmid, Achim Bittner, P. M. Mayrhofer, 2015, Microtechnologies for the New Millennium.

Influence of c-axis orientation and scandium concentration on infrared active modes of magnetron sputtered ScxAl1−xN thin films

U. Schmid, P. Mayrhofer, A. Bittner, 2013 .

Precise Determination of d33 and d31 from Piezoelectric Deflection Measurements and 2D FEM Simulations Applied to ScxAl1-xN☆

U. Schmid, M. Schneider, P. Mayrhofer, 2016 .

Temperature dependant dielectric breakdown of sputter-deposited AlN thin films using a time-zero approach

U. Schmid, M. Schneider, A. Bittner, 2013, Microsystem Technologies.

Investigation on the dielectric behavior of aluminum nitride thin films at different temperatures applying a time-zero approach

Ulrich Schmid, Achim Bittner, Michael Schneider, 2013, Microtechnologies for the New Millennium.

Design, fabrication and testing of a piezoelectric energy microgenerator

U. Schmid, N. Kherani, A. Bittner, 2014, Microsystem Technologies.

Modeling the performance of a micromachined piezoelectric energy harvester

David Koo, U. Schmid, A. Bittner, 2012 .

Modeling the performance of a micromachined piezoelectric energy harvester

U. Schmid, N. Kherani, M. Schneider, 2012, Microsystem Technologies.

LTCC: a fascinating technology platform for miniaturized devices

Ulrich Schmid, U. Schmid, 2007, SPIE Microtechnologies.

Development of HfO2/Al2O3 Stack for On-Chip Capacitor Applications

J. Prásek, J. Hubálek, U. Schmid, 2019, 2019 42nd International Spring Seminar on Electronics Technology (ISSE).

Energy harvesting for autonomous wireless sensor nodes in aircraft

Ulrich Schmid, Martin Kluge, Th. Becker, 2010 .

A Robust Hot Film Anemometer for Injection Quantity Measurements

U. Schmid, G. Kroetz, 2002 .

A Thermal Flow Sensor For Common Rail Injection Systems

D. Schmitt-Landsiedel, G. Krötz, U. Schmid, 2001 .

Wine fermentation sensor based on piezoelectric resonators

U. Schmid, J. Sánchez-Rojas, M. Schneider, 2017, 2017 IEEE SENSORS.

Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2016 .

Modelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid media

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2016 .

Comparison of in-plane and out-of-plane piezoelectric microresonators for real-time monitoring of engine oil contamination with diesel

U. Schmid, T. Manzaneque, J. Sánchez-Rojas, 2016, Microsystem Technologies.

Out-of-plane piezoelectric microresonator and oscillator circuit for monitoring engine oil contamination with diesel

J. L. Sánchez-Rojas, E. Wistrela, U. Schmid, 2015, Microtechnologies for the New Millennium.

Generation of a porous device layer on SOI substrates

U. Schmid, F. Patocka, A. Backes, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ulrich Schmid, Erwin Peiner, Andreas Waag, 2010 .